JPH0379435B2 - - Google Patents

Info

Publication number
JPH0379435B2
JPH0379435B2 JP58225785A JP22578583A JPH0379435B2 JP H0379435 B2 JPH0379435 B2 JP H0379435B2 JP 58225785 A JP58225785 A JP 58225785A JP 22578583 A JP22578583 A JP 22578583A JP H0379435 B2 JPH0379435 B2 JP H0379435B2
Authority
JP
Japan
Prior art keywords
high frequency
polymer
substrate
frequency coil
polymer sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58225785A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60116773A (ja
Inventor
Soichi Matsuzaki
Minoru Osada
Jiro Ichimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lincstech Circuit Co Ltd
Original Assignee
Hitachi AIC Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi AIC Inc filed Critical Hitachi AIC Inc
Priority to JP22578583A priority Critical patent/JPS60116773A/ja
Publication of JPS60116773A publication Critical patent/JPS60116773A/ja
Publication of JPH0379435B2 publication Critical patent/JPH0379435B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP22578583A 1983-11-30 1983-11-30 イオンプレ−ティング装置 Granted JPS60116773A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22578583A JPS60116773A (ja) 1983-11-30 1983-11-30 イオンプレ−ティング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22578583A JPS60116773A (ja) 1983-11-30 1983-11-30 イオンプレ−ティング装置

Publications (2)

Publication Number Publication Date
JPS60116773A JPS60116773A (ja) 1985-06-24
JPH0379435B2 true JPH0379435B2 (enExample) 1991-12-18

Family

ID=16834738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22578583A Granted JPS60116773A (ja) 1983-11-30 1983-11-30 イオンプレ−ティング装置

Country Status (1)

Country Link
JP (1) JPS60116773A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0621349B2 (ja) * 1986-03-12 1994-03-23 株式会社ト−ビ 高速移動フイルムの連続的イオンプレ−テイング装置
JP2007274185A (ja) * 2006-03-30 2007-10-18 Matsushita Electric Works Ltd タイムスイッチ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57134558A (en) * 1981-02-16 1982-08-19 Fuji Photo Film Co Ltd Production of organic vapor deposited thin film
JPS59153881A (ja) * 1983-02-18 1984-09-01 Hitachi Ltd 皮膜形成装置

Also Published As

Publication number Publication date
JPS60116773A (ja) 1985-06-24

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