JPS60113102A - 微細パタ−ン検査方法 - Google Patents

微細パタ−ン検査方法

Info

Publication number
JPS60113102A
JPS60113102A JP58220634A JP22063483A JPS60113102A JP S60113102 A JPS60113102 A JP S60113102A JP 58220634 A JP58220634 A JP 58220634A JP 22063483 A JP22063483 A JP 22063483A JP S60113102 A JPS60113102 A JP S60113102A
Authority
JP
Japan
Prior art keywords
design data
pattern
data pattern
pixel
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58220634A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410565B2 (enrdf_load_stackoverflow
Inventor
Yasuhiko Hara
靖彦 原
Satoshi Fushimi
智 伏見
Yoshimasa Oshima
良正 大島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58220634A priority Critical patent/JPS60113102A/ja
Publication of JPS60113102A publication Critical patent/JPS60113102A/ja
Publication of JPH0410565B2 publication Critical patent/JPH0410565B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Electron Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58220634A 1983-11-25 1983-11-25 微細パタ−ン検査方法 Granted JPS60113102A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58220634A JPS60113102A (ja) 1983-11-25 1983-11-25 微細パタ−ン検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58220634A JPS60113102A (ja) 1983-11-25 1983-11-25 微細パタ−ン検査方法

Publications (2)

Publication Number Publication Date
JPS60113102A true JPS60113102A (ja) 1985-06-19
JPH0410565B2 JPH0410565B2 (enrdf_load_stackoverflow) 1992-02-25

Family

ID=16754041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58220634A Granted JPS60113102A (ja) 1983-11-25 1983-11-25 微細パタ−ン検査方法

Country Status (1)

Country Link
JP (1) JPS60113102A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022172504A1 (ja) * 2021-02-15 2022-08-18 株式会社ニューフレアテクノロジー 欠陥検査装置及び欠陥検査方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022172504A1 (ja) * 2021-02-15 2022-08-18 株式会社ニューフレアテクノロジー 欠陥検査装置及び欠陥検査方法
JP2022124187A (ja) * 2021-02-15 2022-08-25 株式会社ニューフレアテクノロジー 欠陥検査装置及び欠陥検査方法

Also Published As

Publication number Publication date
JPH0410565B2 (enrdf_load_stackoverflow) 1992-02-25

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