JPS60110869A - 真空成膜用導電性マスキング材 - Google Patents

真空成膜用導電性マスキング材

Info

Publication number
JPS60110869A
JPS60110869A JP21850683A JP21850683A JPS60110869A JP S60110869 A JPS60110869 A JP S60110869A JP 21850683 A JP21850683 A JP 21850683A JP 21850683 A JP21850683 A JP 21850683A JP S60110869 A JPS60110869 A JP S60110869A
Authority
JP
Japan
Prior art keywords
masking material
film formation
conductive
vacuum film
weight ratio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21850683A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6315344B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shoji Yokoishi
章司 横石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP21850683A priority Critical patent/JPS60110869A/ja
Publication of JPS60110869A publication Critical patent/JPS60110869A/ja
Publication of JPS6315344B2 publication Critical patent/JPS6315344B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP21850683A 1983-11-18 1983-11-18 真空成膜用導電性マスキング材 Granted JPS60110869A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21850683A JPS60110869A (ja) 1983-11-18 1983-11-18 真空成膜用導電性マスキング材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21850683A JPS60110869A (ja) 1983-11-18 1983-11-18 真空成膜用導電性マスキング材

Publications (2)

Publication Number Publication Date
JPS60110869A true JPS60110869A (ja) 1985-06-17
JPS6315344B2 JPS6315344B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-04

Family

ID=16720989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21850683A Granted JPS60110869A (ja) 1983-11-18 1983-11-18 真空成膜用導電性マスキング材

Country Status (1)

Country Link
JP (1) JPS60110869A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007003572A3 (de) * 2005-07-01 2007-04-26 Siemens Ag Verfahren zum abscheiden eines materials in ein loch in einem elektrisch leitenden werkstück
JP2012140644A (ja) * 2009-12-04 2012-07-26 Siemens Ag マスキング材料、マスキング層、基板のマスキング方法および基板の被覆方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007003572A3 (de) * 2005-07-01 2007-04-26 Siemens Ag Verfahren zum abscheiden eines materials in ein loch in einem elektrisch leitenden werkstück
JP2012140644A (ja) * 2009-12-04 2012-07-26 Siemens Ag マスキング材料、マスキング層、基板のマスキング方法および基板の被覆方法

Also Published As

Publication number Publication date
JPS6315344B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-04

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