JPS60103633A - ウエハプローバ装置 - Google Patents

ウエハプローバ装置

Info

Publication number
JPS60103633A
JPS60103633A JP58210968A JP21096883A JPS60103633A JP S60103633 A JPS60103633 A JP S60103633A JP 58210968 A JP58210968 A JP 58210968A JP 21096883 A JP21096883 A JP 21096883A JP S60103633 A JPS60103633 A JP S60103633A
Authority
JP
Japan
Prior art keywords
wafer
camera
stage
chip
computer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58210968A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0256812B2 (enrdf_load_stackoverflow
Inventor
Katsujiro Shibayama
芝山　勝次郎
Katsushi Ishikawa
石川　勝士
Masuzo Ikumi
生見　益三
Fukuo Iwatani
岩谷　福雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP58210968A priority Critical patent/JPS60103633A/ja
Publication of JPS60103633A publication Critical patent/JPS60103633A/ja
Publication of JPH0256812B2 publication Critical patent/JPH0256812B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP58210968A 1983-11-11 1983-11-11 ウエハプローバ装置 Granted JPS60103633A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58210968A JPS60103633A (ja) 1983-11-11 1983-11-11 ウエハプローバ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58210968A JPS60103633A (ja) 1983-11-11 1983-11-11 ウエハプローバ装置

Publications (2)

Publication Number Publication Date
JPS60103633A true JPS60103633A (ja) 1985-06-07
JPH0256812B2 JPH0256812B2 (enrdf_load_stackoverflow) 1990-12-03

Family

ID=16598100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58210968A Granted JPS60103633A (ja) 1983-11-11 1983-11-11 ウエハプローバ装置

Country Status (1)

Country Link
JP (1) JPS60103633A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63261727A (ja) * 1987-04-20 1988-10-28 Tokyo Electron Ltd 板状体の面歪み補正方法
JPH023253A (ja) * 1988-06-18 1990-01-08 Teru Kyushu Kk プローブ装置
JPH0228344A (ja) * 1988-07-18 1990-01-30 Tokyo Electron Ltd 半導体検査装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63261727A (ja) * 1987-04-20 1988-10-28 Tokyo Electron Ltd 板状体の面歪み補正方法
JPH023253A (ja) * 1988-06-18 1990-01-08 Teru Kyushu Kk プローブ装置
JPH0228344A (ja) * 1988-07-18 1990-01-30 Tokyo Electron Ltd 半導体検査装置

Also Published As

Publication number Publication date
JPH0256812B2 (enrdf_load_stackoverflow) 1990-12-03

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