JPS60102707A - 薄膜形成品のスクリ−ニング方法 - Google Patents

薄膜形成品のスクリ−ニング方法

Info

Publication number
JPS60102707A
JPS60102707A JP58208951A JP20895183A JPS60102707A JP S60102707 A JPS60102707 A JP S60102707A JP 58208951 A JP58208951 A JP 58208951A JP 20895183 A JP20895183 A JP 20895183A JP S60102707 A JPS60102707 A JP S60102707A
Authority
JP
Japan
Prior art keywords
thin film
conductor
voltage
defects
forming bacteria
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58208951A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0237681B2 (enrdf_load_stackoverflow
Inventor
Yasuhiro Narukawa
成川　泰弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58208951A priority Critical patent/JPS60102707A/ja
Publication of JPS60102707A publication Critical patent/JPS60102707A/ja
Publication of JPH0237681B2 publication Critical patent/JPH0237681B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
JP58208951A 1983-11-09 1983-11-09 薄膜形成品のスクリ−ニング方法 Granted JPS60102707A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58208951A JPS60102707A (ja) 1983-11-09 1983-11-09 薄膜形成品のスクリ−ニング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58208951A JPS60102707A (ja) 1983-11-09 1983-11-09 薄膜形成品のスクリ−ニング方法

Publications (2)

Publication Number Publication Date
JPS60102707A true JPS60102707A (ja) 1985-06-06
JPH0237681B2 JPH0237681B2 (enrdf_load_stackoverflow) 1990-08-27

Family

ID=16564842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58208951A Granted JPS60102707A (ja) 1983-11-09 1983-11-09 薄膜形成品のスクリ−ニング方法

Country Status (1)

Country Link
JP (1) JPS60102707A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6300771B1 (en) 1997-11-28 2001-10-09 Nec Corporation Electrical inspection device for detecting a latent defect
JP2006220652A (ja) * 2005-02-10 2006-08-24 General Electric Co <Ge> 電気回路の接合部及び接触部を品質認定するための方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6300771B1 (en) 1997-11-28 2001-10-09 Nec Corporation Electrical inspection device for detecting a latent defect
JP2006220652A (ja) * 2005-02-10 2006-08-24 General Electric Co <Ge> 電気回路の接合部及び接触部を品質認定するための方法

Also Published As

Publication number Publication date
JPH0237681B2 (enrdf_load_stackoverflow) 1990-08-27

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