JPS5999238A - 表面検査装置 - Google Patents

表面検査装置

Info

Publication number
JPS5999238A
JPS5999238A JP57209047A JP20904782A JPS5999238A JP S5999238 A JPS5999238 A JP S5999238A JP 57209047 A JP57209047 A JP 57209047A JP 20904782 A JP20904782 A JP 20904782A JP S5999238 A JPS5999238 A JP S5999238A
Authority
JP
Japan
Prior art keywords
width
circuit
inspected
histogram
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57209047A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0562293B2 (enrdf_load_stackoverflow
Inventor
Chiaki Fukazawa
深沢　千秋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP57209047A priority Critical patent/JPS5999238A/ja
Publication of JPS5999238A publication Critical patent/JPS5999238A/ja
Publication of JPH0562293B2 publication Critical patent/JPH0562293B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
JP57209047A 1982-11-29 1982-11-29 表面検査装置 Granted JPS5999238A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57209047A JPS5999238A (ja) 1982-11-29 1982-11-29 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57209047A JPS5999238A (ja) 1982-11-29 1982-11-29 表面検査装置

Publications (2)

Publication Number Publication Date
JPS5999238A true JPS5999238A (ja) 1984-06-07
JPH0562293B2 JPH0562293B2 (enrdf_load_stackoverflow) 1993-09-08

Family

ID=16566369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57209047A Granted JPS5999238A (ja) 1982-11-29 1982-11-29 表面検査装置

Country Status (1)

Country Link
JP (1) JPS5999238A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013002810A (ja) * 2011-06-10 2013-01-07 Institute Of National Colleges Of Technology Japan 研削工具の砥面検査システム及び方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56114747A (en) * 1980-02-14 1981-09-09 Nippon Steel Corp Surface inspection device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56114747A (en) * 1980-02-14 1981-09-09 Nippon Steel Corp Surface inspection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013002810A (ja) * 2011-06-10 2013-01-07 Institute Of National Colleges Of Technology Japan 研削工具の砥面検査システム及び方法

Also Published As

Publication number Publication date
JPH0562293B2 (enrdf_load_stackoverflow) 1993-09-08

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