JPS5997507A - 等軸的粒状粒子からなる高純度窒化ケイ素粉末の製法 - Google Patents

等軸的粒状粒子からなる高純度窒化ケイ素粉末の製法

Info

Publication number
JPS5997507A
JPS5997507A JP20613882A JP20613882A JPS5997507A JP S5997507 A JPS5997507 A JP S5997507A JP 20613882 A JP20613882 A JP 20613882A JP 20613882 A JP20613882 A JP 20613882A JP S5997507 A JPS5997507 A JP S5997507A
Authority
JP
Japan
Prior art keywords
silicon nitride
nitride powder
powder
ammonia
high purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20613882A
Other languages
English (en)
Japanese (ja)
Other versions
JPS621564B2 (enExample
Inventor
Hiroaki Tanji
丹治　宏彰
Shigeo Hiyama
桧山　茂雄
Tadasuke Shigi
志儀　忠輔
Masaji Ishii
石井　正司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP20613882A priority Critical patent/JPS5997507A/ja
Publication of JPS5997507A publication Critical patent/JPS5997507A/ja
Publication of JPS621564B2 publication Critical patent/JPS621564B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP20613882A 1982-11-26 1982-11-26 等軸的粒状粒子からなる高純度窒化ケイ素粉末の製法 Granted JPS5997507A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20613882A JPS5997507A (ja) 1982-11-26 1982-11-26 等軸的粒状粒子からなる高純度窒化ケイ素粉末の製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20613882A JPS5997507A (ja) 1982-11-26 1982-11-26 等軸的粒状粒子からなる高純度窒化ケイ素粉末の製法

Publications (2)

Publication Number Publication Date
JPS5997507A true JPS5997507A (ja) 1984-06-05
JPS621564B2 JPS621564B2 (enExample) 1987-01-14

Family

ID=16518409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20613882A Granted JPS5997507A (ja) 1982-11-26 1982-11-26 等軸的粒状粒子からなる高純度窒化ケイ素粉末の製法

Country Status (1)

Country Link
JP (1) JPS5997507A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5466310A (en) * 1991-02-19 1995-11-14 The Australian National University Production of metal and metalloid nitrides

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020241700A1 (ja) * 2019-05-30 2020-12-03 デンカ株式会社 窒化ケイ素粉末及びその製造方法、並びに、窒化ケイ素焼結体の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5466310A (en) * 1991-02-19 1995-11-14 The Australian National University Production of metal and metalloid nitrides

Also Published As

Publication number Publication date
JPS621564B2 (enExample) 1987-01-14

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