JPS599083U - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS599083U
JPS599083U JP10269082U JP10269082U JPS599083U JP S599083 U JPS599083 U JP S599083U JP 10269082 U JP10269082 U JP 10269082U JP 10269082 U JP10269082 U JP 10269082U JP S599083 U JPS599083 U JP S599083U
Authority
JP
Japan
Prior art keywords
metal
vapor phase
phase growth
belljar
growth equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10269082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6113562Y2 (enrdf_load_stackoverflow
Inventor
後藤　泰山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP10269082U priority Critical patent/JPS599083U/ja
Publication of JPS599083U publication Critical patent/JPS599083U/ja
Application granted granted Critical
Publication of JPS6113562Y2 publication Critical patent/JPS6113562Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP10269082U 1982-07-07 1982-07-07 気相成長装置 Granted JPS599083U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10269082U JPS599083U (ja) 1982-07-07 1982-07-07 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10269082U JPS599083U (ja) 1982-07-07 1982-07-07 気相成長装置

Publications (2)

Publication Number Publication Date
JPS599083U true JPS599083U (ja) 1984-01-20
JPS6113562Y2 JPS6113562Y2 (enrdf_load_stackoverflow) 1986-04-26

Family

ID=30241927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10269082U Granted JPS599083U (ja) 1982-07-07 1982-07-07 気相成長装置

Country Status (1)

Country Link
JP (1) JPS599083U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191474U (enrdf_load_stackoverflow) * 1985-05-21 1986-11-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191474U (enrdf_load_stackoverflow) * 1985-05-21 1986-11-28

Also Published As

Publication number Publication date
JPS6113562Y2 (enrdf_load_stackoverflow) 1986-04-26

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