JPS5988307A - 炭化けい素被覆物の製造方法 - Google Patents

炭化けい素被覆物の製造方法

Info

Publication number
JPS5988307A
JPS5988307A JP57195702A JP19570282A JPS5988307A JP S5988307 A JPS5988307 A JP S5988307A JP 57195702 A JP57195702 A JP 57195702A JP 19570282 A JP19570282 A JP 19570282A JP S5988307 A JPS5988307 A JP S5988307A
Authority
JP
Japan
Prior art keywords
silicon carbide
substrate
organosilicon compound
plate
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57195702A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6117910B2 (enrdf_load_stackoverflow
Inventor
Morinobu Endo
守信 遠藤
Minoru Takamizawa
高見沢　稔
Tatsuhiko Motomiya
本宮　達彦
Yasushi Kobayashi
小林　泰史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP57195702A priority Critical patent/JPS5988307A/ja
Priority to US06/533,649 priority patent/US4560589A/en
Publication of JPS5988307A publication Critical patent/JPS5988307A/ja
Publication of JPS6117910B2 publication Critical patent/JPS6117910B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5057—Carbides
    • C04B41/5059—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F11/00—Chemical after-treatment of artificial filaments or the like during manufacture
    • D01F11/10—Chemical after-treatment of artificial filaments or the like during manufacture of carbon
    • D01F11/12—Chemical after-treatment of artificial filaments or the like during manufacture of carbon with inorganic substances ; Intercalation
    • D01F11/126—Carbides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Structural Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Textile Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
JP57195702A 1982-09-22 1982-11-08 炭化けい素被覆物の製造方法 Granted JPS5988307A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57195702A JPS5988307A (ja) 1982-11-08 1982-11-08 炭化けい素被覆物の製造方法
US06/533,649 US4560589A (en) 1982-09-22 1983-09-19 Method for providing a coating layer of silicon carbide on substrate surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57195702A JPS5988307A (ja) 1982-11-08 1982-11-08 炭化けい素被覆物の製造方法

Publications (2)

Publication Number Publication Date
JPS5988307A true JPS5988307A (ja) 1984-05-22
JPS6117910B2 JPS6117910B2 (enrdf_load_stackoverflow) 1986-05-09

Family

ID=16345554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57195702A Granted JPS5988307A (ja) 1982-09-22 1982-11-08 炭化けい素被覆物の製造方法

Country Status (1)

Country Link
JP (1) JPS5988307A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0489377A (ja) * 1990-07-27 1992-03-23 Natl Res Inst For Metals 高強度ＳｉＣ・炭素繊維複合材とその製造方法
JP2002293523A (ja) * 2001-03-30 2002-10-09 Japan Fine Ceramics Center カーボンナノチューブ膜、カーボンナノチューブ膜含有ＳｉＣ基板、カーボンナノチューブ膜体及びそれらの製造方法
JP2003063813A (ja) * 2001-08-29 2003-03-05 Japan Fine Ceramics Center カーボンナノチューブ膜、カーボンナノチューブ膜体及びカーボンナノチューブ膜付き基板並びにそれらの製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
POWDER METALLUGY INTERNATIONAL=1980 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0489377A (ja) * 1990-07-27 1992-03-23 Natl Res Inst For Metals 高強度ＳｉＣ・炭素繊維複合材とその製造方法
JP2002293523A (ja) * 2001-03-30 2002-10-09 Japan Fine Ceramics Center カーボンナノチューブ膜、カーボンナノチューブ膜含有ＳｉＣ基板、カーボンナノチューブ膜体及びそれらの製造方法
JP2003063813A (ja) * 2001-08-29 2003-03-05 Japan Fine Ceramics Center カーボンナノチューブ膜、カーボンナノチューブ膜体及びカーボンナノチューブ膜付き基板並びにそれらの製造方法

Also Published As

Publication number Publication date
JPS6117910B2 (enrdf_load_stackoverflow) 1986-05-09

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