JPS5986238A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法Info
- Publication number
- JPS5986238A JPS5986238A JP58161616A JP16161683A JPS5986238A JP S5986238 A JPS5986238 A JP S5986238A JP 58161616 A JP58161616 A JP 58161616A JP 16161683 A JP16161683 A JP 16161683A JP S5986238 A JPS5986238 A JP S5986238A
- Authority
- JP
- Japan
- Prior art keywords
- region
- oxide
- junction
- films
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58161616A JPS5986238A (ja) | 1983-09-02 | 1983-09-02 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58161616A JPS5986238A (ja) | 1983-09-02 | 1983-09-02 | 半導体装置の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51114052A Division JPS6035818B2 (ja) | 1976-09-22 | 1976-09-22 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5986238A true JPS5986238A (ja) | 1984-05-18 |
| JPS6229891B2 JPS6229891B2 (enrdf_load_stackoverflow) | 1987-06-29 |
Family
ID=15738553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58161616A Granted JPS5986238A (ja) | 1983-09-02 | 1983-09-02 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5986238A (enrdf_load_stackoverflow) |
-
1983
- 1983-09-02 JP JP58161616A patent/JPS5986238A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6229891B2 (enrdf_load_stackoverflow) | 1987-06-29 |
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