JPS598353A - 半導体集積回路装置 - Google Patents

半導体集積回路装置

Info

Publication number
JPS598353A
JPS598353A JP57117969A JP11796982A JPS598353A JP S598353 A JPS598353 A JP S598353A JP 57117969 A JP57117969 A JP 57117969A JP 11796982 A JP11796982 A JP 11796982A JP S598353 A JPS598353 A JP S598353A
Authority
JP
Japan
Prior art keywords
substrate
impurity layer
conductivity type
oxide film
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57117969A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0358180B2 (enExample
Inventor
Takao Kamata
鎌田　隆夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP57117969A priority Critical patent/JPS598353A/ja
Publication of JPS598353A publication Critical patent/JPS598353A/ja
Publication of JPH0358180B2 publication Critical patent/JPH0358180B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/014—
    • H10W10/17—

Landscapes

  • Element Separation (AREA)
JP57117969A 1982-07-07 1982-07-07 半導体集積回路装置 Granted JPS598353A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57117969A JPS598353A (ja) 1982-07-07 1982-07-07 半導体集積回路装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57117969A JPS598353A (ja) 1982-07-07 1982-07-07 半導体集積回路装置

Publications (2)

Publication Number Publication Date
JPS598353A true JPS598353A (ja) 1984-01-17
JPH0358180B2 JPH0358180B2 (enExample) 1991-09-04

Family

ID=14724753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57117969A Granted JPS598353A (ja) 1982-07-07 1982-07-07 半導体集積回路装置

Country Status (1)

Country Link
JP (1) JPS598353A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1143505A3 (en) * 1989-07-28 2001-11-07 AT&T Corp. Planar isolation technique for integrated circuits

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5226182A (en) * 1975-08-25 1977-02-26 Hitachi Ltd Manufacturing method of semi-conductor unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5226182A (en) * 1975-08-25 1977-02-26 Hitachi Ltd Manufacturing method of semi-conductor unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1143505A3 (en) * 1989-07-28 2001-11-07 AT&T Corp. Planar isolation technique for integrated circuits

Also Published As

Publication number Publication date
JPH0358180B2 (enExample) 1991-09-04

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