JPS5983023A - 半導体圧力差圧検出器 - Google Patents

半導体圧力差圧検出器

Info

Publication number
JPS5983023A
JPS5983023A JP19245482A JP19245482A JPS5983023A JP S5983023 A JPS5983023 A JP S5983023A JP 19245482 A JP19245482 A JP 19245482A JP 19245482 A JP19245482 A JP 19245482A JP S5983023 A JPS5983023 A JP S5983023A
Authority
JP
Japan
Prior art keywords
diaphragm
strain
pressure
semiconductor pressure
pressure difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19245482A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0419495B2 (enrdf_load_stackoverflow
Inventor
Michitaka Shimazoe
島添　道隆
Tsutomu Okayama
岡山　努
Yoshitaka Matsuoka
松岡　祥隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP19245482A priority Critical patent/JPS5983023A/ja
Publication of JPS5983023A publication Critical patent/JPS5983023A/ja
Publication of JPH0419495B2 publication Critical patent/JPH0419495B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
JP19245482A 1982-11-04 1982-11-04 半導体圧力差圧検出器 Granted JPS5983023A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19245482A JPS5983023A (ja) 1982-11-04 1982-11-04 半導体圧力差圧検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19245482A JPS5983023A (ja) 1982-11-04 1982-11-04 半導体圧力差圧検出器

Publications (2)

Publication Number Publication Date
JPS5983023A true JPS5983023A (ja) 1984-05-14
JPH0419495B2 JPH0419495B2 (enrdf_load_stackoverflow) 1992-03-30

Family

ID=16291565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19245482A Granted JPS5983023A (ja) 1982-11-04 1982-11-04 半導体圧力差圧検出器

Country Status (1)

Country Link
JP (1) JPS5983023A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2532806A (en) * 2014-11-25 2016-06-01 Continental Automotive Systems Us Inc Piezoresistive pressure sensor device
US20170328797A1 (en) * 2016-05-12 2017-11-16 Continental Automotive Systems, Inc. Pressure sensor device with anchors for die shrinkage and high sensitivity
JP2021039043A (ja) * 2019-09-05 2021-03-11 ミツミ電機株式会社 圧力感知素子及び圧力センサ
WO2023037832A1 (ja) * 2021-09-08 2023-03-16 ミネベアミツミ株式会社 脈波センサ
WO2023106197A1 (ja) * 2021-12-09 2023-06-15 ミネベアミツミ株式会社 脈波測定装置
WO2023167172A1 (ja) * 2022-03-04 2023-09-07 ミネベアミツミ株式会社 脈波センサ

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2532806A (en) * 2014-11-25 2016-06-01 Continental Automotive Systems Us Inc Piezoresistive pressure sensor device
US9764947B2 (en) 2014-11-25 2017-09-19 Continental Automotive Systems, Inc. Piezoresistive pressure sensor device
US20170328797A1 (en) * 2016-05-12 2017-11-16 Continental Automotive Systems, Inc. Pressure sensor device with anchors for die shrinkage and high sensitivity
CN107421663A (zh) * 2016-05-12 2017-12-01 大陆汽车系统公司 用于模收缩和高灵敏度的具有锚定件的压力传感器装置
US9964458B2 (en) 2016-05-12 2018-05-08 Continental Automotive Systems, Inc. Pressure sensor device with anchors for die shrinkage and high sensitivity
GB2555768A (en) * 2016-05-12 2018-05-16 Continental automotive systems inc Pressure sensor device with anchors for die shrinkage and high sensitivity
JP2021039043A (ja) * 2019-09-05 2021-03-11 ミツミ電機株式会社 圧力感知素子及び圧力センサ
WO2023037832A1 (ja) * 2021-09-08 2023-03-16 ミネベアミツミ株式会社 脈波センサ
JP2023039125A (ja) * 2021-09-08 2023-03-20 ミネベアミツミ株式会社 脈波センサ
WO2023106197A1 (ja) * 2021-12-09 2023-06-15 ミネベアミツミ株式会社 脈波測定装置
JP2023085754A (ja) * 2021-12-09 2023-06-21 ミネベアミツミ株式会社 脈波測定装置
WO2023167172A1 (ja) * 2022-03-04 2023-09-07 ミネベアミツミ株式会社 脈波センサ

Also Published As

Publication number Publication date
JPH0419495B2 (enrdf_load_stackoverflow) 1992-03-30

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