JPS5981549A - 感ガス素子の製造方法 - Google Patents

感ガス素子の製造方法

Info

Publication number
JPS5981549A
JPS5981549A JP18017383A JP18017383A JPS5981549A JP S5981549 A JPS5981549 A JP S5981549A JP 18017383 A JP18017383 A JP 18017383A JP 18017383 A JP18017383 A JP 18017383A JP S5981549 A JPS5981549 A JP S5981549A
Authority
JP
Japan
Prior art keywords
gas
catalyst
sensitive
layer
sensitive material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18017383A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322584B2 (enrdf_load_stackoverflow
Inventor
Noboru Ichinose
昇 一ノ瀬
Yuji Yokomizo
雄二 横溝
Hideo Okuma
大熊　英夫
Takashi Takahashi
孝 高橋
Masaki Katsura
桂　正樹
Mieko Nishihara
西原　美重子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP18017383A priority Critical patent/JPS5981549A/ja
Publication of JPS5981549A publication Critical patent/JPS5981549A/ja
Publication of JPH0322584B2 publication Critical patent/JPH0322584B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP18017383A 1983-09-30 1983-09-30 感ガス素子の製造方法 Granted JPS5981549A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18017383A JPS5981549A (ja) 1983-09-30 1983-09-30 感ガス素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18017383A JPS5981549A (ja) 1983-09-30 1983-09-30 感ガス素子の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP869877A Division JPS5395097A (en) 1977-01-31 1977-01-31 Gas-sensitive element

Publications (2)

Publication Number Publication Date
JPS5981549A true JPS5981549A (ja) 1984-05-11
JPH0322584B2 JPH0322584B2 (enrdf_load_stackoverflow) 1991-03-27

Family

ID=16078669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18017383A Granted JPS5981549A (ja) 1983-09-30 1983-09-30 感ガス素子の製造方法

Country Status (1)

Country Link
JP (1) JPS5981549A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4243732A1 (de) * 1992-12-23 1994-06-30 Bosch Gmbh Robert Sensoranordnung zur Bestimmung von Gaskomponenten und/oder Gaskonzentrationen von Gasgemischen

Also Published As

Publication number Publication date
JPH0322584B2 (enrdf_load_stackoverflow) 1991-03-27

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