JPS5980968A - 半導体集積回路装置の製造方法 - Google Patents
半導体集積回路装置の製造方法Info
- Publication number
- JPS5980968A JPS5980968A JP57192773A JP19277382A JPS5980968A JP S5980968 A JPS5980968 A JP S5980968A JP 57192773 A JP57192773 A JP 57192773A JP 19277382 A JP19277382 A JP 19277382A JP S5980968 A JPS5980968 A JP S5980968A
- Authority
- JP
- Japan
- Prior art keywords
- film
- oxide film
- silicon
- integrated circuit
- circuit device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/30—Devices controlled by electric currents or voltages
- H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H10D48/34—Bipolar devices
- H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions
Landscapes
- Bipolar Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57192773A JPS5980968A (ja) | 1982-11-01 | 1982-11-01 | 半導体集積回路装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57192773A JPS5980968A (ja) | 1982-11-01 | 1982-11-01 | 半導体集積回路装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5980968A true JPS5980968A (ja) | 1984-05-10 |
JPH0136709B2 JPH0136709B2 (enrdf_load_html_response) | 1989-08-02 |
Family
ID=16296781
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57192773A Granted JPS5980968A (ja) | 1982-11-01 | 1982-11-01 | 半導体集積回路装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5980968A (enrdf_load_html_response) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61147572A (ja) * | 1984-12-20 | 1986-07-05 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0323698U (enrdf_load_html_response) * | 1989-07-18 | 1991-03-12 |
-
1982
- 1982-11-01 JP JP57192773A patent/JPS5980968A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61147572A (ja) * | 1984-12-20 | 1986-07-05 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0136709B2 (enrdf_load_html_response) | 1989-08-02 |