JPS5977576A - パタ−ンの欠陥検査装置 - Google Patents

パタ−ンの欠陥検査装置

Info

Publication number
JPS5977576A
JPS5977576A JP57187346A JP18734682A JPS5977576A JP S5977576 A JPS5977576 A JP S5977576A JP 57187346 A JP57187346 A JP 57187346A JP 18734682 A JP18734682 A JP 18734682A JP S5977576 A JPS5977576 A JP S5977576A
Authority
JP
Japan
Prior art keywords
circuit
image
information
memory
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57187346A
Other languages
English (en)
Japanese (ja)
Other versions
JPS642992B2 (enrdf_load_stackoverflow
Inventor
Kaoru Kikuchi
菊池　薫
Junji Hazama
間　潤治
Toru Azuma
徹 東
Kazunari Hata
一成 秦
Norio Fujii
藤井　憲男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP57187346A priority Critical patent/JPS5977576A/ja
Publication of JPS5977576A publication Critical patent/JPS5977576A/ja
Publication of JPS642992B2 publication Critical patent/JPS642992B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/74—Image or video pattern matching; Proximity measures in feature spaces
    • G06V10/75—Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries

Landscapes

  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Medical Informatics (AREA)
  • Artificial Intelligence (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Databases & Information Systems (AREA)
  • Evolutionary Computation (AREA)
  • Computing Systems (AREA)
  • Software Systems (AREA)
  • Chemical & Material Sciences (AREA)
  • Multimedia (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57187346A 1982-10-27 1982-10-27 パタ−ンの欠陥検査装置 Granted JPS5977576A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57187346A JPS5977576A (ja) 1982-10-27 1982-10-27 パタ−ンの欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57187346A JPS5977576A (ja) 1982-10-27 1982-10-27 パタ−ンの欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS5977576A true JPS5977576A (ja) 1984-05-04
JPS642992B2 JPS642992B2 (enrdf_load_stackoverflow) 1989-01-19

Family

ID=16204385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57187346A Granted JPS5977576A (ja) 1982-10-27 1982-10-27 パタ−ンの欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS5977576A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61157984A (ja) * 1984-12-29 1986-07-17 Shigumatsukusu Kk 欠陥表示装置
JPS62180275A (ja) * 1986-02-05 1987-08-07 Omron Tateisi Electronics Co プリント基板における不良部品修理方法及び装置
US10632562B2 (en) 2016-08-08 2020-04-28 Shoji Aoyama Electrode for electric resistance welding

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61157984A (ja) * 1984-12-29 1986-07-17 Shigumatsukusu Kk 欠陥表示装置
JPS62180275A (ja) * 1986-02-05 1987-08-07 Omron Tateisi Electronics Co プリント基板における不良部品修理方法及び装置
US10632562B2 (en) 2016-08-08 2020-04-28 Shoji Aoyama Electrode for electric resistance welding

Also Published As

Publication number Publication date
JPS642992B2 (enrdf_load_stackoverflow) 1989-01-19

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