JPS5975676A - 歪センサ - Google Patents

歪センサ

Info

Publication number
JPS5975676A
JPS5975676A JP57185855A JP18585582A JPS5975676A JP S5975676 A JPS5975676 A JP S5975676A JP 57185855 A JP57185855 A JP 57185855A JP 18585582 A JP18585582 A JP 18585582A JP S5975676 A JPS5975676 A JP S5975676A
Authority
JP
Japan
Prior art keywords
layer
pattern
film
resistive
insulating resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57185855A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0259634B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Koichiro Sakamoto
孝一郎 坂本
Shinichi Mizushima
水島　真一
Shozo Takeno
武野　尚三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Sanyo Electric Co Ltd
Toshiba Corp
Toshiba Tec Corp
Original Assignee
Tokyo Sanyo Electric Co Ltd
Toshiba Corp
Tokyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Sanyo Electric Co Ltd, Toshiba Corp, Tokyo Electric Co Ltd filed Critical Tokyo Sanyo Electric Co Ltd
Priority to JP57185855A priority Critical patent/JPS5975676A/ja
Publication of JPS5975676A publication Critical patent/JPS5975676A/ja
Publication of JPH0259634B2 publication Critical patent/JPH0259634B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Force In General (AREA)
JP57185855A 1982-10-22 1982-10-22 歪センサ Granted JPS5975676A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57185855A JPS5975676A (ja) 1982-10-22 1982-10-22 歪センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57185855A JPS5975676A (ja) 1982-10-22 1982-10-22 歪センサ

Publications (2)

Publication Number Publication Date
JPS5975676A true JPS5975676A (ja) 1984-04-28
JPH0259634B2 JPH0259634B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-12-13

Family

ID=16178053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57185855A Granted JPS5975676A (ja) 1982-10-22 1982-10-22 歪センサ

Country Status (1)

Country Link
JP (1) JPS5975676A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6440042U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-09-07 1989-03-09
JPS6467985A (en) * 1987-09-08 1989-03-14 Nec Corp Electrostrictive effect element
US5640178A (en) * 1994-09-16 1997-06-17 Fujitsu Limited Pointing device
WO2019151345A1 (ja) * 2018-02-02 2019-08-08 ミネベアミツミ株式会社 ひずみゲージ
US12379268B2 (en) 2020-03-24 2025-08-05 Minebea Mitsumi Inc. Strain gauge

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6440042U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-09-07 1989-03-09
JPS6467985A (en) * 1987-09-08 1989-03-14 Nec Corp Electrostrictive effect element
US5640178A (en) * 1994-09-16 1997-06-17 Fujitsu Limited Pointing device
WO2019151345A1 (ja) * 2018-02-02 2019-08-08 ミネベアミツミ株式会社 ひずみゲージ
JP2019132790A (ja) * 2018-02-02 2019-08-08 ミネベアミツミ株式会社 ひずみゲージ
US11326967B2 (en) 2018-02-02 2022-05-10 Minebea Mitsumi Inc. Strain gauge with improved temperature effect detection
US12379268B2 (en) 2020-03-24 2025-08-05 Minebea Mitsumi Inc. Strain gauge

Also Published As

Publication number Publication date
JPH0259634B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-12-13

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