JPS5975632A - 非晶質又は結晶質の低分極性薄膜 - Google Patents

非晶質又は結晶質の低分極性薄膜

Info

Publication number
JPS5975632A
JPS5975632A JP18616882A JP18616882A JPS5975632A JP S5975632 A JPS5975632 A JP S5975632A JP 18616882 A JP18616882 A JP 18616882A JP 18616882 A JP18616882 A JP 18616882A JP S5975632 A JPS5975632 A JP S5975632A
Authority
JP
Japan
Prior art keywords
polarizability
glass
mol
film
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18616882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0458689B2 (enrdf_load_stackoverflow
Inventor
Keiji Kobayashi
啓二 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=16183577&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS5975632(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP18616882A priority Critical patent/JPS5975632A/ja
Publication of JPS5975632A publication Critical patent/JPS5975632A/ja
Publication of JPH0458689B2 publication Critical patent/JPH0458689B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Glass Compositions (AREA)
  • Formation Of Insulating Films (AREA)
JP18616882A 1982-10-25 1982-10-25 非晶質又は結晶質の低分極性薄膜 Granted JPS5975632A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18616882A JPS5975632A (ja) 1982-10-25 1982-10-25 非晶質又は結晶質の低分極性薄膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18616882A JPS5975632A (ja) 1982-10-25 1982-10-25 非晶質又は結晶質の低分極性薄膜

Publications (2)

Publication Number Publication Date
JPS5975632A true JPS5975632A (ja) 1984-04-28
JPH0458689B2 JPH0458689B2 (enrdf_load_stackoverflow) 1992-09-18

Family

ID=16183577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18616882A Granted JPS5975632A (ja) 1982-10-25 1982-10-25 非晶質又は結晶質の低分極性薄膜

Country Status (1)

Country Link
JP (1) JPS5975632A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60245137A (ja) * 1984-05-21 1985-12-04 Toshiba Corp 半導体デバイス

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60245137A (ja) * 1984-05-21 1985-12-04 Toshiba Corp 半導体デバイス

Also Published As

Publication number Publication date
JPH0458689B2 (enrdf_load_stackoverflow) 1992-09-18

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