JPS5975596U - turbo molecular pump - Google Patents
turbo molecular pumpInfo
- Publication number
- JPS5975596U JPS5975596U JP17207182U JP17207182U JPS5975596U JP S5975596 U JPS5975596 U JP S5975596U JP 17207182 U JP17207182 U JP 17207182U JP 17207182 U JP17207182 U JP 17207182U JP S5975596 U JPS5975596 U JP S5975596U
- Authority
- JP
- Japan
- Prior art keywords
- stator
- molecular pump
- turbo
- blades
- circumferential direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案のターボ分子ポンプの固定子および静翼
の一実施例における製造過程を示す要部平面図、第２図
は本考案のポンプの要部拡大断面図である。
１・・・回転子、２・・・固定子、２１・・・スリット
、２２・・・静翼、２３・・・くびれ部、４・・・スペ
ーサ。FIG. 1 is a plan view of a main part showing the manufacturing process of an embodiment of the stator and stationary vane of a turbomolecular pump of the present invention, and FIG. 2 is an enlarged sectional view of the main part of the pump of the present invention. DESCRIPTION OF SYMBOLS 1... Rotor, 2... Stator, 21... Slit, 22... Stationary blade, 23... Neck part, 4... Spacer.
Claims (2)
心に配列され、各段の中間に円周方向へ多数の静翼をも
つ固定子がスペーサを介して配置されてなるターボ分子
ポンプにおいて、前記回転子の少なくとも動翼はアルミ
ニウムからなり、かつ、その表面が耐蝕性処理膜で被覆
され、前記固定子は不銹鋼からなることを特徴とするタ
ーボ分子ポンプ。(1) Multiple stages of rotors having a large number of moving blades in the circumferential direction are arranged concentrically, and a stator having a large number of stator blades in the circumferential direction is placed between each stage with a spacer interposed therebetween. A turbo-molecular pump characterized in that at least the rotor blades are made of aluminum, the surface thereof is coated with a corrosion-resistant treated film, and the stator is made of stainless steel.
字状スリットが設けられ、該スリットに挾まれた部分が
板曲されて静翼が形成された実用新案登録請求の範囲第
１項記載のターボ分子ポンプ。(2) The stators are placed at equal intervals on the same circumference of the thin plate ring.
The turbo-molecular pump according to claim 1, wherein a letter-shaped slit is provided, and a portion sandwiched by the slit is bent to form a stator vane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17207182U JPS5975596U (en) | 1982-11-12 | 1982-11-12 | turbo molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17207182U JPS5975596U (en) | 1982-11-12 | 1982-11-12 | turbo molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5975596U true JPS5975596U (en) | 1984-05-22 |
| JPS6226638Y2 JPS6226638Y2 (en) | 1987-07-08 |
Family
ID=30375182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17207182U Granted JPS5975596U (en) | 1982-11-12 | 1982-11-12 | turbo molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5975596U (en) |
-
1982
- 1982-11-12 JP JP17207182U patent/JPS5975596U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6226638Y2 (en) | 1987-07-08 |
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