JPS6334393U - - Google Patents
Info
- Publication number
- JPS6334393U JPS6334393U JP12738486U JP12738486U JPS6334393U JP S6334393 U JPS6334393 U JP S6334393U JP 12738486 U JP12738486 U JP 12738486U JP 12738486 U JP12738486 U JP 12738486U JP S6334393 U JPS6334393 U JP S6334393U
- Authority
- JP
- Japan
- Prior art keywords
- stator
- rotor
- circumferential direction
- large number
- blades
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005452 bending Methods 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係るターボ分子ポンプを示す
要部断面図、第２図は製造過程における固定子の
一部を示す平面図である。
２……動翼、３……回転子、４……静翼、５…
…固定子、６……円形環状薄板、１１……スリツ
ト。
FIG. 1 is a sectional view of a main part of a turbomolecular pump according to the present invention, and FIG. 2 is a plan view showing a part of a stator in the manufacturing process. 2... Moving blade, 3... Rotor, 4... Stationary blade, 5...
... Stator, 6... Circular annular thin plate, 11... Slit.
Claims (1)
列された回転子と、この回転子の各段間にスペー
サを介して配設され円周方向に多数の静翼を有す
る固定子とを備えたターボ分子ポンプにおいて、
前記固定子を同一円周上に等間隔をおいてコ字状
のスリツトが設けられた円形環状薄板で形成し、
前記スリツトに囲まれた部分を片面側へのみ折曲
げて前記静翼を形成したことを特徴とするターボ
分子ポンプ。 A rotor that has a large number of moving blades in the circumferential direction and is coaxially arranged in multiple stages, and a stator that has a large number of stator blades in the circumferential direction that are arranged with spacers interposed between each stage of the rotor. In a turbomolecular pump equipped with
The stator is formed of a circular annular thin plate provided with U-shaped slits at equal intervals on the same circumference,
A turbo-molecular pump characterized in that the stationary blade is formed by bending a portion surrounded by the slit only toward one side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12738486U JPS6334393U (en) | 1986-08-20 | 1986-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12738486U JPS6334393U (en) | 1986-08-20 | 1986-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6334393U true JPS6334393U (en) | 1988-03-05 |
Family
ID=31022085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12738486U Pending JPS6334393U (en) | 1986-08-20 | 1986-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6334393U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006090231A (en) * | 2004-09-24 | 2006-04-06 | Boc Edwards Kk | Method for manufacturing fixed blade of turbo molecular pump and vacuum pump |
| WO2006137333A1 (en) * | 2005-06-22 | 2006-12-28 | Edwards Japan Limited | Turbo-molecular pump and method of assembling turbo-molecular pump |
| WO2007004542A1 (en) * | 2005-07-01 | 2007-01-11 | Boc Edwards Japan Limited | Turbo molecular pump |
-
1986
- 1986-08-20 JP JP12738486U patent/JPS6334393U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006090231A (en) * | 2004-09-24 | 2006-04-06 | Boc Edwards Kk | Method for manufacturing fixed blade of turbo molecular pump and vacuum pump |
| WO2006137333A1 (en) * | 2005-06-22 | 2006-12-28 | Edwards Japan Limited | Turbo-molecular pump and method of assembling turbo-molecular pump |
| WO2007004542A1 (en) * | 2005-07-01 | 2007-01-11 | Boc Edwards Japan Limited | Turbo molecular pump |
| JP5276321B2 (en) * | 2005-07-01 | 2013-08-28 | エドワーズ株式会社 | Turbo molecular pump |