JPS6319094U - - Google Patents
Info
- Publication number
- JPS6319094U JPS6319094U JP11194686U JP11194686U JPS6319094U JP S6319094 U JPS6319094 U JP S6319094U JP 11194686 U JP11194686 U JP 11194686U JP 11194686 U JP11194686 U JP 11194686U JP S6319094 U JPS6319094 U JP S6319094U
- Authority
- JP
- Japan
- Prior art keywords
- slits
- pair
- stator
- turbo
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
第1図はこの考案の一実施例によるターボ分子
ポンプを示す部分断面図、第2図はその固定子の
平面図、第3図は従来のターボ分子ポンプを示す
部分断面図、第4図はその固定子の平面図である
。
図において、1は回転子、3はスペーサ、4は
固定子、5は一対のコ字状スリツト、6は頂部、
7は頚部、8は静翼、9は梁部である。なお、各
図中同一符号は同一または相当部分を示す。
Fig. 1 is a partial sectional view showing a turbomolecular pump according to an embodiment of this invention, Fig. 2 is a plan view of its stator, Fig. 3 is a partial sectional view showing a conventional turbomolecular pump, and Fig. 4 is a partial sectional view showing a turbomolecular pump according to an embodiment of the invention. FIG. 3 is a plan view of the stator. In the figure, 1 is a rotor, 3 is a spacer, 4 is a stator, 5 is a pair of U-shaped slits, 6 is a top,
7 is a neck, 8 is a stationary blade, and 9 is a beam. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
互に複数段配置してなるターボ分子ポンプにおい
て、上記固定子は、コ字状の頂部を対向させた一
対のスリツトを、薄板円環の同一円周上に等間隔
に設けるとともに、上記頂部間のくびれ部に形成
された頚部を軸として上記一対のスリツトに囲ま
れた部分を所定の角度捩曲することにより、上記
一対のスリツトに囲まれた部分が傾斜して形成さ
れる静翼と、上記一対のスリツトが隣接した部分
に形成される梁部とを備えたことを特徴とするタ
ーボ分子ポンプ。 In a turbo-molecular pump consisting of a rotor and a stator that are mutually coaxial and arranged alternately in multiple stages in the axial direction, the stator has a pair of slits with U-shaped tops facing each other in a thin circular ring. The slits are arranged at equal intervals on the same circumference of the slits, and by twisting the part surrounded by the pair of slits at a predetermined angle around the neck formed at the constriction between the tops, 1. A turbo-molecular pump comprising: a stator vane whose surrounded portion is formed at an angle; and a beam portion formed at a portion where the pair of slits are adjacent to each other.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11194686U JPS6319094U (en) | 1986-07-21 | 1986-07-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11194686U JPS6319094U (en) | 1986-07-21 | 1986-07-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6319094U true JPS6319094U (en) | 1988-02-08 |
Family
ID=30992357
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11194686U Pending JPS6319094U (en) | 1986-07-21 | 1986-07-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6319094U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006348935A (en) * | 2005-06-11 | 2006-12-28 | Pfeiffer Vacuum Gmbh | Stator disk for turbo molecular pump |
-
1986
- 1986-07-21 JP JP11194686U patent/JPS6319094U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006348935A (en) * | 2005-06-11 | 2006-12-28 | Pfeiffer Vacuum Gmbh | Stator disk for turbo molecular pump |
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