JPS6449694U - - Google Patents
Info
- Publication number
- JPS6449694U JPS6449694U JP14550587U JP14550587U JPS6449694U JP S6449694 U JPS6449694 U JP S6449694U JP 14550587 U JP14550587 U JP 14550587U JP 14550587 U JP14550587 U JP 14550587U JP S6449694 U JPS6449694 U JP S6449694U
- Authority
- JP
- Japan
- Prior art keywords
- wing
- annular
- spacer
- section
- fixed wing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１〜３図は本考案によるターボ分子ポンプの
一実施例を示す図であり、第１図はターボ分子ポ
ンプの断面図、第２図はステータ翼の平面図、第
３図はステータ翼、ロータ翼およびスペーサの拡
大断面図、第４図は従来の固定翼の平面図、第５
図は第４図における―矢視断面図である。
１０……ターボ分子ポンプ、１２……ハウジン
グ、１３……ステータ翼（固定翼）、１３ａ……
翼部、１３ｂ……環状部、１５……ロータ、１６
……ロータ翼（回転翼）、１８……ステータコラ
ム、２０……モータ、２２……スペーサ、２２ａ
……環状突起。
1 to 3 are views showing an embodiment of the turbo-molecular pump according to the present invention, in which FIG. 1 is a sectional view of the turbo-molecular pump, FIG. 2 is a plan view of the stator blade, and FIG. 3 is a stator blade, Figure 4 is an enlarged sectional view of the rotor blade and spacer; Figure 4 is a plan view of a conventional fixed blade;
The figure is a sectional view taken along the - arrow in FIG. 4. 10...Turbo molecular pump, 12...Housing, 13...Stator blade (fixed wing), 13a...
Wing part, 13b...Annular part, 15...Rotor, 16
... Rotor blade (rotor blade), 18 ... Stator column, 20 ... Motor, 22 ... Spacer, 22a
...Annular process.
Claims (1)
的に連結して形成された固定翼を有し、前記翼部
の先端部を環状のスペーサで挾んでハウジング内
側軸方向に固定翼を回転翼と交互に複数配置した
ターボ分子ポンプにおいて、前記スペーサの内周
部に、内径が前記回転翼の外径と一致あるいは重
なるような環状突起を形成したことを特徴とする
ターボ分子ポンプ。 It has a fixed wing formed by integrally connecting a plurality of radial wing sections with a radially inner annular section, and the tip of the wing section is sandwiched between an annular spacer and the fixed wing is attached in the axial direction inside the housing. A turbo-molecular pump in which a plurality of rotary blades are arranged alternately, characterized in that an annular protrusion whose inner diameter matches or overlaps the outer diameter of the rotor blade is formed on the inner peripheral part of the spacer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14550587U JPS6449694U (en) | 1987-09-24 | 1987-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14550587U JPS6449694U (en) | 1987-09-24 | 1987-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6449694U true JPS6449694U (en) | 1989-03-28 |
Family
ID=31414156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14550587U Pending JPS6449694U (en) | 1987-09-24 | 1987-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6449694U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04219495A (en) * | 1990-02-16 | 1992-08-10 | Varian Spa | Stator for turbo-molecular pump |
-
1987
- 1987-09-24 JP JP14550587U patent/JPS6449694U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04219495A (en) * | 1990-02-16 | 1992-08-10 | Varian Spa | Stator for turbo-molecular pump |