JPH0411294U - - Google Patents
Info
- Publication number
- JPH0411294U JPH0411294U JP5169790U JP5169790U JPH0411294U JP H0411294 U JPH0411294 U JP H0411294U JP 5169790 U JP5169790 U JP 5169790U JP 5169790 U JP5169790 U JP 5169790U JP H0411294 U JPH0411294 U JP H0411294U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- blade
- rotor
- stator
- axial direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図ないし第３図は本考案による真空ポンプ
の一実施例を示す図であり、第１図は本考案が適
用されたターボ分子ポンプの全体断面図、第２図
はステータ翼の平面図、第３図はロータ翼とステ
ータ翼の断面図、第４図ないし第６図は従来の真
空ポンプを示す図であり、第４図はターボ分子ポ
ンプの全体断面図、第５図はロータ翼とステータ
翼の断面図、第６図はステータ翼の平面図である
。
１……ケーシング、５……ロータ翼、６……ス
テータ翼、５ａ，６ａ……翼部、４……ロータ、
５ｂ……凹半円形状、６ｃ……凸半円形状。
1 to 3 are diagrams showing an embodiment of a vacuum pump according to the present invention. FIG. 1 is an overall sectional view of a turbomolecular pump to which the present invention is applied, and FIG. 2 is a plan view of a stator blade. , Fig. 3 is a sectional view of the rotor blade and stator blade, Figs. 4 to 6 are views showing a conventional vacuum pump, Fig. 4 is an overall sectional view of the turbomolecular pump, and Fig. 5 is a sectional view of the rotor blade. and FIG. 6 is a sectional view of the stator blade, and FIG. 6 is a plan view of the stator blade. DESCRIPTION OF SYMBOLS 1... Casing, 5... Rotor blade, 6... Stator blade, 5a, 6a... Wing part, 4... Rotor,
5b... Concave semicircular shape, 6c... Convex semicircular shape.
Claims (1)
部から半径内方に伸びる翼部を円周方向に複数並
べて有し、ケーシングの軸方向に多数並べて配置
されるステータ翼と、前記ケーシングの軸線部に
回転可能に設けられるロータと、このロータの外
周部から半径外方に伸びる翼部を円周方向に複数
並べて有し、前記ケーシングの軸方向に前記ステ
ータ翼と交互に多数並べて配置されるロータ翼と
を備えた真空ポンプにおいて、前記ケーシングの
軸線に沿つた平面内における前記ステータ翼の半
径内方端を略凸円弧形状に形成し、前記平面内に
おける前記ロータ翼の翼部の付根部に前記略凸円
弧形状と嵌合する略凹円弧形状を形成することを
特徴とする真空ポンプ。 A cylindrical casing, a plurality of blades extending radially inward from the inner circumference of the casing are arranged circumferentially, a large number of stator blades are arranged side by side in the axial direction of the casing, and a plurality of stator blades are arranged in the axial direction of the casing. A rotor blade that has a rotor that is rotatably provided, and a plurality of blade parts that extend radially outward from the outer periphery of the rotor, arranged in a circumferential direction, and that a large number of blade parts are arranged in a row alternately with the stator blade in the axial direction of the casing. In the vacuum pump, the radially inner end of the stator blade in a plane along the axis of the casing is formed into a substantially convex arc shape, and the root part of the blade part of the rotor blade in the plane has the A vacuum pump characterized by forming a substantially concave arc shape that fits into a substantially convex arc shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5169790U JPH0411294U (en) | 1990-05-17 | 1990-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5169790U JPH0411294U (en) | 1990-05-17 | 1990-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0411294U true JPH0411294U (en) | 1992-01-30 |
Family
ID=31571362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5169790U Pending JPH0411294U (en) | 1990-05-17 | 1990-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0411294U (en) |
-
1990
- 1990-05-17 JP JP5169790U patent/JPH0411294U/ja active Pending