JPS5975550A - 荷電粒子線の集束方法 - Google Patents

荷電粒子線の集束方法

Info

Publication number
JPS5975550A
JPS5975550A JP57186919A JP18691982A JPS5975550A JP S5975550 A JPS5975550 A JP S5975550A JP 57186919 A JP57186919 A JP 57186919A JP 18691982 A JP18691982 A JP 18691982A JP S5975550 A JPS5975550 A JP S5975550A
Authority
JP
Japan
Prior art keywords
charged particle
filter
lens
wien
particle beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57186919A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0133897B2 (enExample
Inventor
Etsuo Ban
伴　悦夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP57186919A priority Critical patent/JPS5975550A/ja
Publication of JPS5975550A publication Critical patent/JPS5975550A/ja
Publication of JPH0133897B2 publication Critical patent/JPH0133897B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
JP57186919A 1982-10-25 1982-10-25 荷電粒子線の集束方法 Granted JPS5975550A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57186919A JPS5975550A (ja) 1982-10-25 1982-10-25 荷電粒子線の集束方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57186919A JPS5975550A (ja) 1982-10-25 1982-10-25 荷電粒子線の集束方法

Publications (2)

Publication Number Publication Date
JPS5975550A true JPS5975550A (ja) 1984-04-28
JPH0133897B2 JPH0133897B2 (enExample) 1989-07-17

Family

ID=16196988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57186919A Granted JPS5975550A (ja) 1982-10-25 1982-10-25 荷電粒子線の集束方法

Country Status (1)

Country Link
JP (1) JPS5975550A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6465759A (en) * 1987-08-10 1989-03-13 Philips Nv Charged powder apparatus with beam discriminator
JP2001148227A (ja) * 1999-11-12 2001-05-29 Advantest Corp ２つの粒子線を分離するための偏向装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916065U (ja) * 1982-07-23 1984-01-31 株式会社日立製作所 質量分析光学系

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916065U (ja) * 1982-07-23 1984-01-31 株式会社日立製作所 質量分析光学系

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6465759A (en) * 1987-08-10 1989-03-13 Philips Nv Charged powder apparatus with beam discriminator
JP2001148227A (ja) * 1999-11-12 2001-05-29 Advantest Corp ２つの粒子線を分離するための偏向装置

Also Published As

Publication number Publication date
JPH0133897B2 (enExample) 1989-07-17

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