JPS5975104A - 歪センサ - Google Patents

歪センサ

Info

Publication number
JPS5975104A
JPS5975104A JP18585682A JP18585682A JPS5975104A JP S5975104 A JPS5975104 A JP S5975104A JP 18585682 A JP18585682 A JP 18585682A JP 18585682 A JP18585682 A JP 18585682A JP S5975104 A JPS5975104 A JP S5975104A
Authority
JP
Japan
Prior art keywords
layer
film
strain sensor
pattern
beam body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18585682A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331201B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Koichiro Sakamoto
孝一郎 坂本
Shinichi Mizushima
水島　真一
Shozo Takeno
武野　尚三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Sanyo Electric Co Ltd
Toshiba Corp
Toshiba Tec Corp
Original Assignee
Tokyo Sanyo Electric Co Ltd
Toshiba Corp
Tokyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Sanyo Electric Co Ltd, Toshiba Corp, Tokyo Electric Co Ltd filed Critical Tokyo Sanyo Electric Co Ltd
Priority to JP18585682A priority Critical patent/JPS5975104A/ja
Publication of JPS5975104A publication Critical patent/JPS5975104A/ja
Publication of JPH0331201B2 publication Critical patent/JPH0331201B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Force In General (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP18585682A 1982-10-22 1982-10-22 歪センサ Granted JPS5975104A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18585682A JPS5975104A (ja) 1982-10-22 1982-10-22 歪センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18585682A JPS5975104A (ja) 1982-10-22 1982-10-22 歪センサ

Publications (2)

Publication Number Publication Date
JPS5975104A true JPS5975104A (ja) 1984-04-27
JPH0331201B2 JPH0331201B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-02

Family

ID=16178070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18585682A Granted JPS5975104A (ja) 1982-10-22 1982-10-22 歪センサ

Country Status (1)

Country Link
JP (1) JPS5975104A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06102143A (ja) * 1992-02-03 1994-04-15 Teledyne Ind Inc 歪みセンサ
US5640178A (en) * 1994-09-16 1997-06-17 Fujitsu Limited Pointing device
WO2001004594A1 (fr) * 1999-07-09 2001-01-18 Nok Corporation Jauge de contrainte
JP2014071085A (ja) * 2012-10-02 2014-04-21 Honda Motor Co Ltd 薄膜センサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139992A (en) * 1976-05-06 1977-11-22 Gould Inc Distortion meter and method of manufacture thereof
JPS55144501A (en) * 1979-04-23 1980-11-11 Siemens Ag Strain gauge and making method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139992A (en) * 1976-05-06 1977-11-22 Gould Inc Distortion meter and method of manufacture thereof
JPS55144501A (en) * 1979-04-23 1980-11-11 Siemens Ag Strain gauge and making method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06102143A (ja) * 1992-02-03 1994-04-15 Teledyne Ind Inc 歪みセンサ
US5640178A (en) * 1994-09-16 1997-06-17 Fujitsu Limited Pointing device
WO2001004594A1 (fr) * 1999-07-09 2001-01-18 Nok Corporation Jauge de contrainte
US6614342B1 (en) 1999-07-09 2003-09-02 Nok Corporation Strain gauge
JP2014071085A (ja) * 2012-10-02 2014-04-21 Honda Motor Co Ltd 薄膜センサ

Also Published As

Publication number Publication date
JPH0331201B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-02

Similar Documents

Publication Publication Date Title
US4019168A (en) Bilayer thin film resistor and method for manufacture
JPS62226029A (ja) ロ−ドセルの温度補正方法
JPS5975104A (ja) 歪センサ
US4374159A (en) Fabrication of film circuits having a thick film crossunder and a thin film capacitor
JPS5975676A (ja) 歪センサ
US3022570A (en) Vacuum deposited strain gage and method of making same
Bethe et al. Thin-film strain-gage transducers
JPS6334414B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2001110602A (ja) 薄膜抵抗体形成方法及びセンサ
GB1586857A (en) Resistive films
JPH07131155A (ja) 多層配線基板の製造方法及び多層配線基板
JPS59230101A (ja) 歪センサ
JPS6225977B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP3229460B2 (ja) 歪みゲージ
US4539434A (en) Film-type electrical substrate circuit device and method of forming the device
JPH0145722B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2707717B2 (ja) 混成集積回路
US5023589A (en) Gold diffusion thin film resistors and process
JP2530008B2 (ja) 配線基板の製造方法
JPS6259767B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH05205913A (ja) 金属皮膜固定抵抗器の製造方法
JPS61148859A (ja) 混成集積回路装置およびその製造方法
JPH0327857B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5979103A (ja) 歪センサ
JPH0685100A (ja) 多層モジュ−ル回路基板