JPS5974660U - Cooling means for vacuum equipment - Google Patents
Cooling means for vacuum equipmentInfo
- Publication number
- JPS5974660U JPS5974660U JP17022882U JP17022882U JPS5974660U JP S5974660 U JPS5974660 U JP S5974660U JP 17022882 U JP17022882 U JP 17022882U JP 17022882 U JP17022882 U JP 17022882U JP S5974660 U JPS5974660 U JP S5974660U
- Authority
- JP
- Japan
- Prior art keywords
- cooling means
- vacuum equipment
- cooling
- sponge
- recorded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面は走査電子顕微鏡のクライオ・トラップに本考案を
適用した実施例装置の要部を示す略図である。
１・・・・・・対物レンズ下部磁極片、２・・・・・・
電子線、３・・・・・・試料、４・・・・・・クライオ
・トラップ、５・・・・・・試料室側壁、６・・・・・
・断熱材、７・・・・・・熱伝導棒、８・・・・・・液
体窒素、９・・・・・・冷却槽、１０・・・・・・銅板
、１１．１２・・・・・・銅製スポンジ。The drawing is a schematic diagram showing the main parts of an embodiment of an apparatus in which the present invention is applied to a cryo-trap of a scanning electron microscope. 1... Objective lens lower magnetic pole piece, 2...
Electron beam, 3...sample, 4...cryo trap, 5...sample chamber side wall, 6...
・Insulating material, 7... Heat conduction rod, 8... Liquid nitrogen, 9... Cooling tank, 10... Copper plate, 11.12... ...Copper sponge.
Claims (1)
金属を貼り付けたことを特徴とする真空装置用冷却手段
。A cooling means for a vacuum device, characterized in that a sponge-like metal is pasted on the surface of a plate-like member that is thermally connected to a cooling tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17022882U JPS5974660U (en) | 1982-11-10 | 1982-11-10 | Cooling means for vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17022882U JPS5974660U (en) | 1982-11-10 | 1982-11-10 | Cooling means for vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5974660U true JPS5974660U (en) | 1984-05-21 |
Family
ID=30371670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17022882U Pending JPS5974660U (en) | 1982-11-10 | 1982-11-10 | Cooling means for vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5974660U (en) |
-
1982
- 1982-11-10 JP JP17022882U patent/JPS5974660U/en active Pending
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