JPS59181571U - Sample cooling device for electron microscopes, etc. - Google Patents
Sample cooling device for electron microscopes, etc.Info
- Publication number
- JPS59181571U JPS59181571U JP7588183U JP7588183U JPS59181571U JP S59181571 U JPS59181571 U JP S59181571U JP 7588183 U JP7588183 U JP 7588183U JP 7588183 U JP7588183 U JP 7588183U JP S59181571 U JPS59181571 U JP S59181571U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- cooling device
- electron microscopes
- sample cooling
- cooling tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す縦断面図、第２図及び
第３図は夫々第１図の一部拡大断面図である。
１・・・・・・試料ホルダ、２・・・・・・鏡体、３ａ
・・・・・・対物レンズの上磁極、３ｂ・・・・・・対
物レンズの下磁極、４・・・・・・試料、５・・・・・
・試料台、６・・・・・・外槽、７・・・・・・液体窒
素、８・・・・・・冷却槽、９・・・・・・パイプ、１
０・・・・・・冷却部材、１１．１２・・・・・・ベロ
ーズ、１３・・・・・・外筒、１４・・・・・・切換弁
、１５・・・・・・操作軸、１６゜１７．１８・・・・
・・穴、１９・・・・・・ニードルバルブ。FIG. 1 is a longitudinal sectional view showing one embodiment of the present invention, and FIGS. 2 and 3 are partially enlarged sectional views of FIG. 1, respectively. 1... Sample holder, 2... Mirror body, 3a
...Top magnetic pole of objective lens, 3b...Bottom magnetic pole of objective lens, 4...Sample, 5...
・Sample stand, 6...Outer tank, 7...Liquid nitrogen, 8...Cooling tank, 9...Pipe, 1
0...Cooling member, 11.12...Bellows, 13...Outer cylinder, 14...Switching valve, 15...Operation shaft , 16°17.18...
...hole, 19...needle valve.
Claims (1)
れた冷媒を導くことにより試料を冷却する前装置におい
て、前記冷却槽内で気化した冷媒ガスと冷媒液とを任意
に切換えて試料近傍に送る為の切換手段を設けてなる電
子顕微鏡等における試料冷却装置。In a pre-device that cools a sample by introducing a coolant filled in a cooling tank to the vicinity of the sample placed in the center of the objective lens, the sample is cooled by arbitrarily switching between the refrigerant gas vaporized in the cooling tank and the coolant liquid. A sample cooling device for an electron microscope, etc., which is equipped with a switching means for sending the sample to a nearby location.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7588183U JPS59181571U (en) | 1983-05-20 | 1983-05-20 | Sample cooling device for electron microscopes, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7588183U JPS59181571U (en) | 1983-05-20 | 1983-05-20 | Sample cooling device for electron microscopes, etc. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59181571U true JPS59181571U (en) | 1984-12-04 |
| JPH0125476Y2 JPH0125476Y2 (en) | 1989-07-31 |
Family
ID=30205941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7588183U Granted JPS59181571U (en) | 1983-05-20 | 1983-05-20 | Sample cooling device for electron microscopes, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59181571U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011129441A (en) * | 2009-12-21 | 2011-06-30 | Hitachi High-Technologies Corp | Cooling sample holder and cooling processing method of sample |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50134359A (en) * | 1974-04-10 | 1975-10-24 |
-
1983
- 1983-05-20 JP JP7588183U patent/JPS59181571U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50134359A (en) * | 1974-04-10 | 1975-10-24 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011129441A (en) * | 2009-12-21 | 2011-06-30 | Hitachi High-Technologies Corp | Cooling sample holder and cooling processing method of sample |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0125476Y2 (en) | 1989-07-31 |
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