JPS5974661U - Sample cooling equipment for electron microscopes, etc. - Google Patents
Sample cooling equipment for electron microscopes, etc.Info
- Publication number
- JPS5974661U JPS5974661U JP17023082U JP17023082U JPS5974661U JP S5974661 U JPS5974661 U JP S5974661U JP 17023082 U JP17023082 U JP 17023082U JP 17023082 U JP17023082 U JP 17023082U JP S5974661 U JPS5974661 U JP S5974661U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holder
- cooling equipment
- electron microscopes
- sample cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は杢考案の一実施例を示す全体断面図、第２図は
第１図の主要部断面図である。
１・・・・・・対物レンズ、４・・間磁極片、５・・曲
試料ホルダー、６・・・・・・ステージ、７・・曲保持
体、８・・・・・・冷媒槽、９・・・・・・移動機構、
１２・・曲試料、１５・・・・・・熱伝導棒、１６・・
・・・・試料室、１７・・曲ガス供給源、１８・・・・
・・パイプ、１９・・曲線管、２ｏ・曲・熱電対。FIG. 1 is an overall sectional view showing one embodiment of the heather device, and FIG. 2 is a sectional view of the main part of FIG. 1. DESCRIPTION OF SYMBOLS 1... Objective lens, 4... Between magnetic pole pieces, 5... Curved sample holder, 6... Stage, 7... Curved holder, 8... Coolant tank, 9...Moving mechanism,
12... Curved sample, 15... Heat conduction rod, 16...
...Sample chamber, 17...Curved gas supply source, 18...
・・Pipe, 19・・Curved pipe, 2o・Curved・Thermocouple.
Claims (1)
動可能に支持する機構、冷媒が充満された冷媒槽、前記
試料ホルダーと冷媒槽とを熱的に連結する手段及び前記
試料ホルダ一部に取付けられた温度測定手段を備えた装
置において、前記ホルダーに保持された試料の表面に向
けて該試料の所定冷却温度より高い又は同程度の温度で
固化するガスを流す手段を設けてなる電子顕微鏡等の試
料冷却装置。A holder for holding a sample with good thermal conductivity, a mechanism for movably supporting the holder, a refrigerant tank filled with refrigerant, a means for thermally connecting the sample holder and the refrigerant tank, and a part attached to the sample holder. an electron microscope, etc., comprising a means for flowing a gas that solidifies at a temperature higher than or comparable to the predetermined cooling temperature of the sample toward the surface of the sample held in the holder; sample cooling device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17023082U JPS5974661U (en) | 1982-11-10 | 1982-11-10 | Sample cooling equipment for electron microscopes, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17023082U JPS5974661U (en) | 1982-11-10 | 1982-11-10 | Sample cooling equipment for electron microscopes, etc. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5974661U true JPS5974661U (en) | 1984-05-21 |
| JPS6335480Y2 JPS6335480Y2 (en) | 1988-09-20 |
Family
ID=30371674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17023082U Granted JPS5974661U (en) | 1982-11-10 | 1982-11-10 | Sample cooling equipment for electron microscopes, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5974661U (en) |
-
1982
- 1982-11-10 JP JP17023082U patent/JPS5974661U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6335480Y2 (en) | 1988-09-20 |
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