JPS6025985U - Energy dispersive X-ray detection device - Google Patents

Energy dispersive X-ray detection device

Info

Publication number
JPS6025985U
JPS6025985U JP11687783U JP11687783U JPS6025985U JP S6025985 U JPS6025985 U JP S6025985U JP 11687783 U JP11687783 U JP 11687783U JP 11687783 U JP11687783 U JP 11687783U JP S6025985 U JPS6025985 U JP S6025985U
Authority
JP
Japan
Prior art keywords
heat
heat conductive
energy dispersive
detection device
ray detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11687783U
Other languages
Japanese (ja)
Inventor
栄一 渡辺
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP11687783U priority Critical patent/JPS6025985U/en
Publication of JPS6025985U publication Critical patent/JPS6025985U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来装置の構成断面図、第2図は本考案の一実
施例を示す構成断面図である。 1:冷却槽、2:断熱材、3:液体窒素、4:栓、5:
伝導棒保護パイプ、6:フランジ、7:鏡筒、8:熱伝
導棒、9:X線検出器、10:試料、11:電子線、1
2:特性X線、13:熱伝導材、14:保持部材、15
:案内板、16:案内棒、17:移動棒、18:ハンド
ル。
FIG. 1 is a sectional view of a conventional device, and FIG. 2 is a sectional view of an embodiment of the present invention. 1: Cooling tank, 2: Insulation material, 3: Liquid nitrogen, 4: Plug, 5:
Conductive rod protection pipe, 6: Flange, 7: Lens barrel, 8: Heat conductive rod, 9: X-ray detector, 10: Sample, 11: Electron beam, 1
2: Characteristic X-ray, 13: Thermal conductive material, 14: Holding member, 15
: Guide board, 16: Guide rod, 17: Moving rod, 18: Handle.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 冷却された状態で使用されるX線検出器を具えた装置に
おいて、冷却槽に接続された熱伝導棒と、該熱伝導棒に
着脱可能に設けられた熱伝導材と、該熱伝導材を介して
冷却されるX線検出器と、前記熱伝導棒と熱伝導材を真
空中で着脱する着脱機構とを設けたことを特徴とするエ
ネルギー分散型X線検出器。
In a device equipped with an X-ray detector used in a cooled state, a heat conductive rod connected to a cooling tank, a heat conductive material detachably attached to the heat conductive rod, and a heat conductive material attached to the heat conductive rod are provided. An energy dispersive X-ray detector comprising: an X-ray detector cooled by a heat-conducting member; and an attaching/detaching mechanism for attaching and detaching the heat-conducting rod and the heat-conducting material in a vacuum.
JP11687783U 1983-07-27 1983-07-27 Energy dispersive X-ray detection device Pending JPS6025985U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11687783U JPS6025985U (en) 1983-07-27 1983-07-27 Energy dispersive X-ray detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11687783U JPS6025985U (en) 1983-07-27 1983-07-27 Energy dispersive X-ray detection device

Publications (1)

Publication Number Publication Date
JPS6025985U true JPS6025985U (en) 1985-02-21

Family

ID=30269259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11687783U Pending JPS6025985U (en) 1983-07-27 1983-07-27 Energy dispersive X-ray detection device

Country Status (1)

Country Link
JP (1) JPS6025985U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6454387A (en) * 1987-08-05 1989-03-01 Rinku Anariteikaru Ltd X rays detector
WO2023234153A1 (en) * 2022-05-31 2023-12-07 株式会社堀場製作所 Radiation detection device, control method, and computer program

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6454387A (en) * 1987-08-05 1989-03-01 Rinku Anariteikaru Ltd X rays detector
WO2023234153A1 (en) * 2022-05-31 2023-12-07 株式会社堀場製作所 Radiation detection device, control method, and computer program

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