JPS6025985U - Energy dispersive X-ray detection device - Google Patents
Energy dispersive X-ray detection deviceInfo
- Publication number
- JPS6025985U JPS6025985U JP11687783U JP11687783U JPS6025985U JP S6025985 U JPS6025985 U JP S6025985U JP 11687783 U JP11687783 U JP 11687783U JP 11687783 U JP11687783 U JP 11687783U JP S6025985 U JPS6025985 U JP S6025985U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- heat conductive
- energy dispersive
- detection device
- ray detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title 1
- 239000004020 conductor Substances 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来装置の構成断面図、第2図は本考案の一実
施例を示す構成断面図である。
1:冷却槽、2:断熱材、3:液体窒素、4:栓、5:
伝導棒保護パイプ、6:フランジ、7:鏡筒、8:熱伝
導棒、9:X線検出器、10:試料、11:電子線、1
2:特性X線、13:熱伝導材、14:保持部材、15
:案内板、16:案内棒、17:移動棒、18:ハンド
ル。FIG. 1 is a sectional view of a conventional device, and FIG. 2 is a sectional view of an embodiment of the present invention. 1: Cooling tank, 2: Insulation material, 3: Liquid nitrogen, 4: Plug, 5:
Conductive rod protection pipe, 6: Flange, 7: Lens barrel, 8: Heat conductive rod, 9: X-ray detector, 10: Sample, 11: Electron beam, 1
2: Characteristic X-ray, 13: Thermal conductive material, 14: Holding member, 15
: Guide board, 16: Guide rod, 17: Moving rod, 18: Handle.
Claims (1)
おいて、冷却槽に接続された熱伝導棒と、該熱伝導棒に
着脱可能に設けられた熱伝導材と、該熱伝導材を介して
冷却されるX線検出器と、前記熱伝導棒と熱伝導材を真
空中で着脱する着脱機構とを設けたことを特徴とするエ
ネルギー分散型X線検出器。In a device equipped with an X-ray detector used in a cooled state, a heat conductive rod connected to a cooling tank, a heat conductive material detachably attached to the heat conductive rod, and a heat conductive material attached to the heat conductive rod are provided. An energy dispersive X-ray detector comprising: an X-ray detector cooled by a heat-conducting member; and an attaching/detaching mechanism for attaching and detaching the heat-conducting rod and the heat-conducting material in a vacuum.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11687783U JPS6025985U (en) | 1983-07-27 | 1983-07-27 | Energy dispersive X-ray detection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11687783U JPS6025985U (en) | 1983-07-27 | 1983-07-27 | Energy dispersive X-ray detection device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6025985U true JPS6025985U (en) | 1985-02-21 |
Family
ID=30269259
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11687783U Pending JPS6025985U (en) | 1983-07-27 | 1983-07-27 | Energy dispersive X-ray detection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6025985U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6454387A (en) * | 1987-08-05 | 1989-03-01 | Rinku Anariteikaru Ltd | X rays detector |
WO2023234153A1 (en) * | 2022-05-31 | 2023-12-07 | 株式会社堀場製作所 | Radiation detection device, control method, and computer program |
-
1983
- 1983-07-27 JP JP11687783U patent/JPS6025985U/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6454387A (en) * | 1987-08-05 | 1989-03-01 | Rinku Anariteikaru Ltd | X rays detector |
WO2023234153A1 (en) * | 2022-05-31 | 2023-12-07 | 株式会社堀場製作所 | Radiation detection device, control method, and computer program |
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