JPS6042256U - Sample contamination prevention device for electron microscopes, etc. - Google Patents
Sample contamination prevention device for electron microscopes, etc.Info
- Publication number
- JPS6042256U JPS6042256U JP13465883U JP13465883U JPS6042256U JP S6042256 U JPS6042256 U JP S6042256U JP 13465883 U JP13465883 U JP 13465883U JP 13465883 U JP13465883 U JP 13465883U JP S6042256 U JPS6042256 U JP S6042256U
- Authority
- JP
- Japan
- Prior art keywords
- prevention device
- heat shield
- sample
- cryopump
- electron microscopes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案９一実施例を示す構成略図、第２図は本
考案に使用されるクライオポンプの説明図である。
１：鏡体、２：試料、３：冷却トラップ、４：冷却体、
５：クライオポンプ、６：排気管、９：第１のステージ
、１０：第２のステージ、１４：熱伝導棒、１５：ベロ
ーズ、１７：第１の熱シールド筒、２１：第２の熱シー
ルド筒。FIG. 1 is a schematic structural diagram showing a 9th embodiment of the present invention, and FIG. 2 is an explanatory diagram of a cryopump used in the present invention. 1: Mirror body, 2: Sample, 3: Cooling trap, 4: Cooling body,
5: Cryopump, 6: Exhaust pipe, 9: First stage, 10: Second stage, 14: Heat conduction rod, 15: Bellows, 17: First heat shield cylinder, 21: Second heat shield Tube.
Claims (1)
を防止するようになした装置において、前記冷却トラッ
プを熱遮蔽するための熱シールド部材を設け、前記冷却
トラップ及び熱シールド部材を冷却するためのクライオ
ポンプを設け、該クライオポンプの一番低い温度の第２
のステージを前記冷却トラップに接続すると共に該クラ
イオポンプの第２のステージよりも高い温度の第１のス
テージを前記熱シールド部材に接続してなる電子顕微鏡
等における試料冷却装置。In an apparatus that prevents contamination of a sample by placing a cooling trap near the sample, a heat shield member for thermally shielding the cooling trap is provided, and a heat shield member for cooling the cooling trap and the heat shield member is provided. A cryopump is provided, and a second lowest temperature of the cryopump is provided.
A sample cooling device for an electron microscope or the like, comprising: a stage of the cryopump connected to the cooling trap, and a first stage having a higher temperature than the second stage of the cryopump connected to the heat shield member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13465883U JPS6042256U (en) | 1983-08-31 | 1983-08-31 | Sample contamination prevention device for electron microscopes, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13465883U JPS6042256U (en) | 1983-08-31 | 1983-08-31 | Sample contamination prevention device for electron microscopes, etc. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6042256U true JPS6042256U (en) | 1985-03-25 |
| JPS643171Y2 JPS643171Y2 (en) | 1989-01-26 |
Family
ID=30303353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13465883U Granted JPS6042256U (en) | 1983-08-31 | 1983-08-31 | Sample contamination prevention device for electron microscopes, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6042256U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005100988A (en) * | 2003-09-24 | 2005-04-14 | Carl Zeiss Nts Gmbh | Particle radiating device |
-
1983
- 1983-08-31 JP JP13465883U patent/JPS6042256U/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005100988A (en) * | 2003-09-24 | 2005-04-14 | Carl Zeiss Nts Gmbh | Particle radiating device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS643171Y2 (en) | 1989-01-26 |
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