JPS61751U - Frozen sample observation device for scanning electron microscope - Google Patents
Frozen sample observation device for scanning electron microscopeInfo
- Publication number
- JPS61751U JPS61751U JP8467684U JP8467684U JPS61751U JP S61751 U JPS61751 U JP S61751U JP 8467684 U JP8467684 U JP 8467684U JP 8467684 U JP8467684 U JP 8467684U JP S61751 U JPS61751 U JP S61751U
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- sample
- observation device
- frozen sample
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
添付図面は本考案の一実施例を示す構成略図である。
１：試料室、２：対物レンズ、３：ステージ、４：Ｘ移
動台、５：Ｙ移動台、６：冷却台、７：熱絶縁物、８：
冷却棒、９，１５：冷却槽、１０：冷却台、１１：凍結
試料、１２：処理室、１４：エアーロツク弁、１６：保
持台、１８，１９：加熱ヒータ、２０：冷却フィン。The accompanying drawings are schematic diagrams showing an embodiment of the present invention. 1: Sample chamber, 2: Objective lens, 3: Stage, 4: X moving table, 5: Y moving table, 6: Cooling table, 7: Thermal insulator, 8:
Cooling rod, 9, 15: Cooling tank, 10: Cooling table, 11: Frozen sample, 12: Processing chamber, 14: Air lock valve, 16: Holding table, 18, 19: Heater, 20: Cooling fin.
Claims (2)
体に熱的に遮断された状態で取付けられた冷却台と、該
冷却台を冷却する手段と、前記冷却台上に着脱可能に装
着され、凍結試料を保持するための試料ホルダと、前記
試料室にエアーロツク弁を介して連通された処理室と、
前記試料ホルダを試料室と処理室との間で往復させるた
めの手段とを備えた装置において、前記試料室内に置か
れた凍結試料を加熱する手段を試料室内に設けてなる走
査電子顕微鏡における凍結試料観察装置。(1) A movable body movably placed in a sample chamber, a cooling stand attached to the movable body in a thermally isolated state, a means for cooling the cooling stand, and a means for attaching and detaching the cooling stand to the cooling stand. a sample holder for holding a frozen sample; a processing chamber communicating with the sample chamber via an airlock valve;
A device for reciprocating the sample holder between a sample chamber and a processing chamber, wherein the apparatus includes means for heating a frozen sample placed in the sample chamber. Sample observation device.
通過穴を形成した冷却フィンを設け、該冷却フィンは前
記冷却台を冷却する手段に熱的に接続したことを特徴と
する実用新案登録請求の範囲第１項記載の走査電子顕微
鏡における凍績試料観察装置。(2) Cooling fins with electron beam passage holes are provided above the frozen sample placed on the cooling table, and the cooling fins are thermally connected to means for cooling the cooling table. A frozen sample observation device for a scanning electron microscope according to claim 1 of the utility model registration claim.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8467684U JPS61751U (en) | 1984-06-07 | 1984-06-07 | Frozen sample observation device for scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8467684U JPS61751U (en) | 1984-06-07 | 1984-06-07 | Frozen sample observation device for scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61751U true JPS61751U (en) | 1986-01-07 |
Family
ID=30634383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8467684U Pending JPS61751U (en) | 1984-06-07 | 1984-06-07 | Frozen sample observation device for scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61751U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07280714A (en) * | 1994-04-13 | 1995-10-27 | Jeol Ltd | Manufacture of biological sample for scanning electron microscope, device therefor and biological sample observing method |
| JP2005062130A (en) * | 2003-08-20 | 2005-03-10 | Canon Inc | Microflake preparing device |
| JP2018206596A (en) * | 2017-06-02 | 2018-12-27 | 国立研究開発法人物質・材料研究機構 | Sample cooling device |
-
1984
- 1984-06-07 JP JP8467684U patent/JPS61751U/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07280714A (en) * | 1994-04-13 | 1995-10-27 | Jeol Ltd | Manufacture of biological sample for scanning electron microscope, device therefor and biological sample observing method |
| JP2005062130A (en) * | 2003-08-20 | 2005-03-10 | Canon Inc | Microflake preparing device |
| JP2018206596A (en) * | 2017-06-02 | 2018-12-27 | 国立研究開発法人物質・材料研究機構 | Sample cooling device |
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