JPH03101852U - - Google Patents
Info
- Publication number
- JPH03101852U JPH03101852U JP939190U JP939190U JPH03101852U JP H03101852 U JPH03101852 U JP H03101852U JP 939190 U JP939190 U JP 939190U JP 939190 U JP939190 U JP 939190U JP H03101852 U JPH03101852 U JP H03101852U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- sample
- analysis device
- pretreatment
- pretreatment chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005211 surface analysis Methods 0.000 claims description 4
- 238000001073 sample cooling Methods 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Description
第１図はこの考案にかかる表面分析装置の構成
図、第２図はこの考案にかかる装置を使用して冷
却状態の試料温度の経時変化の状態を実験した時
の結果を示すグラフ、第３図は従来の表面分析装
置の真空室で試料を加熱する場合の様子を示す図
、第４図は同じく表面分析装置における試料の冷
却装置の概要図である。
１……真空室、１ａ……分析室、１ｂ……前処
理室、２……試料ホルダ、３……試料冷却ブロツ
ク、４……冷媒用通路、５……加熱ランプ。
Fig. 1 is a block diagram of the surface analysis device according to this invention, Fig. 2 is a graph showing the results of an experiment on the change in temperature of a sample over time in a cooling state using the device according to this invention, and Fig. 3 This figure shows how a sample is heated in the vacuum chamber of a conventional surface analysis device, and FIG. 4 is a schematic diagram of a sample cooling device in the same surface analysis device. 1... Vacuum chamber, 1a... Analysis chamber, 1b... Pretreatment chamber, 2... Sample holder, 3... Sample cooling block, 4... Coolant passage, 5... Heat lamp.
Claims (1)
れると共に該前処理室には試料加熱ランプと試料
冷却ブロツクとの一方または両方が設置され、更
に分析室と前記前処理室との間には熱容量の大き
な試料ホルダが往復動可能に設置されることを特
徴とする表面分析装置。 The vacuum chamber is separated into an analysis chamber and a pretreatment chamber, and the pretreatment chamber is equipped with one or both of a sample heating lamp and a sample cooling block, and a A surface analysis device characterized in that a sample holder with a large heat capacity is installed in between so that it can move back and forth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP939190U JPH03101852U (en) | 1990-01-31 | 1990-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP939190U JPH03101852U (en) | 1990-01-31 | 1990-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03101852U true JPH03101852U (en) | 1991-10-23 |
Family
ID=31512995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP939190U Pending JPH03101852U (en) | 1990-01-31 | 1990-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03101852U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009157475A1 (en) * | 2008-06-24 | 2009-12-30 | 新日本製鐵株式会社 | Gas charge container, atom probe apparatus, and method for analyzing hydrogen position in material |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59221955A (en) * | 1983-05-31 | 1984-12-13 | Internatl Precision Inc | Specimen observing method through quick cryo-stage |
-
1990
- 1990-01-31 JP JP939190U patent/JPH03101852U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59221955A (en) * | 1983-05-31 | 1984-12-13 | Internatl Precision Inc | Specimen observing method through quick cryo-stage |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009157475A1 (en) * | 2008-06-24 | 2009-12-30 | 新日本製鐵株式会社 | Gas charge container, atom probe apparatus, and method for analyzing hydrogen position in material |
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