JPH01103249U - - Google Patents
Info
- Publication number
- JPH01103249U JPH01103249U JP20023287U JP20023287U JPH01103249U JP H01103249 U JPH01103249 U JP H01103249U JP 20023287 U JP20023287 U JP 20023287U JP 20023287 U JP20023287 U JP 20023287U JP H01103249 U JPH01103249 U JP H01103249U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- chamber
- vacuum
- vacuum chamber
- sample introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
Description
第１図は本考案の一実施例の構成図、第２図は
金属ネツト支持部の別実施例の構成図である。
１……マニピユレータ式試料ステージ、２……
真空室、３……試料導入棒、４……試料ホルダー
、５……試料、６……ネツト支持部、７……金属
ネツト、８……ゲートバルブ、９……試料予備室
、１０……ステージ部試料ホルダー。
FIG. 1 is a block diagram of one embodiment of the present invention, and FIG. 2 is a block diagram of another embodiment of the metal net support section. 1... Manipulator type sample stage, 2...
Vacuum chamber, 3...Sample introduction rod, 4...Sample holder, 5...Sample, 6...Net support section, 7...Metal net, 8...Gate valve, 9...Sample preparation chamber, 10... Stage part sample holder.
Claims (1)
試料を交換する予備排気室（試料予備室）と、予
備排気室と真空室との間を開閉するゲートバルブ
と、予備排気室から真空室に試料を導入する試料
導入棒と、上記試料導入棒の先端部下方に張出す
ように取付けた試料受け皿を備えた真空用試料導
入装置。 In a device that sets a sample in a high vacuum chamber,
A pre-evacuation chamber (sample pre-chamber) for exchanging samples, a gate valve for opening and closing between the pre-evacuation chamber and the vacuum chamber, a sample introduction rod for introducing the sample from the pre-evacuation chamber into the vacuum chamber, and the above-mentioned sample introduction rod. A vacuum sample introduction device equipped with a sample tray attached so as to protrude below the tip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20023287U JPH01103249U (en) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20023287U JPH01103249U (en) | 1987-12-28 | 1987-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01103249U true JPH01103249U (en) | 1989-07-12 |
Family
ID=31490650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20023287U Pending JPH01103249U (en) | 1987-12-28 | 1987-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01103249U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009238426A (en) * | 2008-03-26 | 2009-10-15 | Jeol Ltd | Sample inspecting device, and sample inspecting method |
-
1987
- 1987-12-28 JP JP20023287U patent/JPH01103249U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009238426A (en) * | 2008-03-26 | 2009-10-15 | Jeol Ltd | Sample inspecting device, and sample inspecting method |
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