JPS5895233U - liquid metal ion source - Google Patents

liquid metal ion source

Info

Publication number
JPS5895233U
JPS5895233U JP19069681U JP19069681U JPS5895233U JP S5895233 U JPS5895233 U JP S5895233U JP 19069681 U JP19069681 U JP 19069681U JP 19069681 U JP19069681 U JP 19069681U JP S5895233 U JPS5895233 U JP S5895233U
Authority
JP
Japan
Prior art keywords
ion source
liquid metal
metal ion
needle
reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19069681U
Other languages
Japanese (ja)
Inventor
奥貫　晶彦
穴沢　紀道
相原　龍三
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP19069681U priority Critical patent/JPS5895233U/en
Publication of JPS5895233U publication Critical patent/JPS5895233U/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は液体金属イオン源を示す図、第２図及び第３図
は該イオン源に使用される従来のリザーバ部を示す図、
第４図は本考案の一実施例のリザーバ部を示す図、第５
図は第４図のリザーバ部に使用される板状部材を示す図
、第６図は針状部材の位置決め部材の他の実施例を示す
図である。 １：リザーバ、２：開口、３：針状部材、４，５：フィ
ラメント、６：碍子、７，８：ステム、１０：液体金属
、１１：板状部材、１２：貫通孔、１３：通過孔、１４
．　１５．　１６：支持棒。FIG. 1 is a diagram showing a liquid metal ion source, FIGS. 2 and 3 are diagrams showing a conventional reservoir part used in the ion source,
Figure 4 is a diagram showing the reservoir section of one embodiment of the present invention, Figure 5
This figure shows a plate-like member used in the reservoir part of FIG. 4, and FIG. 6 shows another embodiment of the positioning member for the needle-like member. 1: Reservoir, 2: Opening, 3: Needle member, 4, 5: Filament, 6: Insulator, 7, 8: Stem, 10: Liquid metal, 11: Plate member, 12: Through hole, 13: Passing hole , 14
．． 15. 16: Support rod.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 、底部に開口を有した液体金属を保持するリザーバと、
該リザーバ内部を通り該底部の開口を貫通して配置され
た針状部材と、該針状部材の先端に強電界を形成するた
めの手段とを備えたイオン源において、該リザーバ内部
に該液体金属の流れを阻害することなく該針状部材の位
置決め部材を配置したことを特徴とする液体金属イオン
源。, a reservoir holding liquid metal having an opening at the bottom;
In an ion source, the ion source includes a needle-like member disposed passing through the reservoir and penetrating the bottom opening, and means for forming a strong electric field at the tip of the needle-like member, wherein the liquid is inside the reservoir. A liquid metal ion source characterized in that a positioning member for the needle-like member is arranged without obstructing the flow of metal.
JP19069681U 1981-12-21 1981-12-21 liquid metal ion source Pending JPS5895233U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19069681U JPS5895233U (en) 1981-12-21 1981-12-21 liquid metal ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19069681U JPS5895233U (en) 1981-12-21 1981-12-21 liquid metal ion source

Publications (1)

Publication Number Publication Date
JPS5895233U true JPS5895233U (en) 1983-06-28

Family

ID=30104218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19069681U Pending JPS5895233U (en) 1981-12-21 1981-12-21 liquid metal ion source

Country Status (1)

Country Link
JP (1) JPS5895233U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009245767A (en) * 2008-03-31 2009-10-22 Kobe Steel Ltd Ion source and method of manufacturing the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475636A (en) * 1967-11-14 1969-10-28 Hughes Aircraft Co Liquid-metal arc cathode with maximized electron/atom emission ratio
JPS56112058A (en) * 1980-02-08 1981-09-04 Hitachi Ltd High brightness ion source

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475636A (en) * 1967-11-14 1969-10-28 Hughes Aircraft Co Liquid-metal arc cathode with maximized electron/atom emission ratio
JPS56112058A (en) * 1980-02-08 1981-09-04 Hitachi Ltd High brightness ion source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009245767A (en) * 2008-03-31 2009-10-22 Kobe Steel Ltd Ion source and method of manufacturing the same

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