JPS6071065U - ion source - Google Patents

ion source

Info

Publication number
JPS6071065U
JPS6071065U JP16290083U JP16290083U JPS6071065U JP S6071065 U JPS6071065 U JP S6071065U JP 16290083 U JP16290083 U JP 16290083U JP 16290083 U JP16290083 U JP 16290083U JP S6071065 U JPS6071065 U JP S6071065U
Authority
JP
Japan
Prior art keywords
ion source
sample
target
sample reservoir
reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16290083U
Other languages
Japanese (ja)
Other versions
JPH043386Y2 (en
Inventor
哲夫 樋口
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP16290083U priority Critical patent/JPS6071065U/en
Publication of JPS6071065U publication Critical patent/JPS6071065U/en
Application granted granted Critical
Publication of JPH043386Y2 publication Critical patent/JPH043386Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明の一実施例を示す図、第２図はそのＡ−
Ａ断面図である。 １：金属製ターゲット、４：穴、５：試料溜、６：溜部
、７：試料移送部。Fig. 1 shows an embodiment of the present invention, and Fig. 2 shows its A-
It is an A sectional view. 1: metal target, 4: hole, 5: sample reservoir, 6: reservoir section, 7: sample transfer section.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 加速したイオン又は中性粒子をターゲット上に載置され
た試料に衝突させるようにしたイオン源において、試料
溜と、該試料溜から上記ターゲットへ試料を移送する樋
状の通路とを設けたことを特徴とするイオン源。An ion source configured to cause accelerated ions or neutral particles to collide with a sample placed on a target, including a sample reservoir and a gutter-like passage for transferring the sample from the sample reservoir to the target. An ion source characterized by:
JP16290083U 1983-10-21 1983-10-21 ion source Granted JPS6071065U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16290083U JPS6071065U (en) 1983-10-21 1983-10-21 ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16290083U JPS6071065U (en) 1983-10-21 1983-10-21 ion source

Publications (2)

Publication Number Publication Date
JPS6071065U true JPS6071065U (en) 1985-05-20
JPH043386Y2 JPH043386Y2 (en) 1992-02-03

Family

ID=30357592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16290083U Granted JPS6071065U (en) 1983-10-21 1983-10-21 ion source

Country Status (1)

Country Link
JP (1) JPS6071065U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5897245A (en) * 1981-12-04 1983-06-09 Jeol Ltd Ion source

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5897245A (en) * 1981-12-04 1983-06-09 Jeol Ltd Ion source

Also Published As

Publication number Publication date
JPH043386Y2 (en) 1992-02-03

Similar Documents

Publication Publication Date Title
JPS6071065U (en) ion source
JPS60174167U (en) ion impact gun
JPS58182350U (en) color cathode ray tube
JPS5867455U (en) Magnetic generator for footwear
JPS5921984U (en) metallic reheal
JPS60158654U (en) ion source device
JPS5842406U (en) Rod-shaped body for embedding
JPS5826594U (en) Ruler with upper diagonal hole for nail holder
JPS5933454U (en) webbed gloves
JPS5820005U (en) Precast panel mounting structure
JPS5853352U (en) electron gun
JPS583180U (en) beam hole
JPS58177636U (en) friction plate
JPS5895233U (en) liquid metal ion source
JPS5860811U (en) Lead wire for electronic components
JPS60126964U (en) Electrode for ion source
JPS59138213U (en) Tubular solenoid coil
JPS6015835U (en) envelope with a hole punched
JPS58164678U (en) Shakupole for cornering
JPS5815805U (en) gas burner
JPS5845363U (en) Vapor deposition equipment
JPS5873421U (en) yam digging tool
JPS5899096U (en) set square
JPS598224U (en) Cable hanging wire holder
JPS60174166U (en) ion impact gun