JPS60174167U - ion impact gun - Google Patents

ion impact gun

Info

Publication number
JPS60174167U
JPS60174167U JP6158984U JP6158984U JPS60174167U JP S60174167 U JPS60174167 U JP S60174167U JP 6158984 U JP6158984 U JP 6158984U JP 6158984 U JP6158984 U JP 6158984U JP S60174167 U JPS60174167 U JP S60174167U
Authority
JP
Japan
Prior art keywords
ion impact
impact gun
gun
ion
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6158984U
Other languages
Japanese (ja)
Inventor
小口　民雄
Original Assignee
セイコーエプソン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーエプソン株式会社 filed Critical セイコーエプソン株式会社
Priority to JP6158984U priority Critical patent/JPS60174167U/en
Publication of JPS60174167U publication Critical patent/JPS60174167U/en
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本考案のイオン衝撃銃の実施例を示す図であ
る。 １・・・試料分析室、２，２ａ・・・イオン衝撃銃、３
・・・試料。FIG. 1 is a diagram showing an embodiment of the ion bombardment gun of the present invention. 1...Sample analysis room, 2,2a...Ion impact gun, 3
···sample.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 表面分析装置において、試料表面を清浄にする、ためお
よび深さ方向の分析を行なうためのイオン衝撃銃を２個
以上の複数個を取り付けることを特徴とするイオン衝撃
銃。An ion impact gun, which is used in a surface analysis device, and is equipped with two or more ion impact guns for cleaning the surface of a sample and for performing analysis in the depth direction.
JP6158984U 1984-04-26 1984-04-26 ion impact gun Pending JPS60174167U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6158984U JPS60174167U (en) 1984-04-26 1984-04-26 ion impact gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6158984U JPS60174167U (en) 1984-04-26 1984-04-26 ion impact gun

Publications (1)

Publication Number Publication Date
JPS60174167U true JPS60174167U (en) 1985-11-18

Family

ID=30589999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6158984U Pending JPS60174167U (en) 1984-04-26 1984-04-26 ion impact gun

Country Status (1)

Country Link
JP (1) JPS60174167U (en)

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