JPS60184257U - ion impact gun - Google Patents

ion impact gun

Info

Publication number
JPS60184257U
JPS60184257U JP7112884U JP7112884U JPS60184257U JP S60184257 U JPS60184257 U JP S60184257U JP 7112884 U JP7112884 U JP 7112884U JP 7112884 U JP7112884 U JP 7112884U JP S60184257 U JPS60184257 U JP S60184257U
Authority
JP
Japan
Prior art keywords
impact gun
ion impact
gun
ion
permanent magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7112884U
Other languages
Japanese (ja)
Inventor
小口　民雄
Original Assignee
セイコーエプソン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーエプソン株式会社 filed Critical セイコーエプソン株式会社
Priority to JP7112884U priority Critical patent/JPS60184257U/en
Publication of JPS60184257U publication Critical patent/JPS60184257U/en
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、本考案のイオン衝撃銃の実施例を示す図であ
る。 １・・・熱陰極フィラメント、２・・・グリッド、３・
・・アノード、４・・・外筒、５・・・円筒型永久磁石
、６・・・試料。FIG. 1 is a diagram showing an embodiment of the ion bombardment gun of the present invention. 1... Hot cathode filament, 2... Grid, 3...
... Anode, 4... Outer tube, 5... Cylindrical permanent magnet, 6... Sample.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 表面分析装置において、試料表面を清浄にするためのお
よび深さ方向の分析を行なうためのイオン衝撃銃に円筒
型永久磁石を付加することを特徴とするイオン衝撃銃。An ion impact gun for cleaning a sample surface and for performing analysis in the depth direction in a surface analysis device, characterized in that a cylindrical permanent magnet is added to the ion impact gun.
JP7112884U 1984-05-16 1984-05-16 ion impact gun Pending JPS60184257U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7112884U JPS60184257U (en) 1984-05-16 1984-05-16 ion impact gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7112884U JPS60184257U (en) 1984-05-16 1984-05-16 ion impact gun

Publications (1)

Publication Number Publication Date
JPS60184257U true JPS60184257U (en) 1985-12-06

Family

ID=30608341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7112884U Pending JPS60184257U (en) 1984-05-16 1984-05-16 ion impact gun

Country Status (1)

Country Link
JP (1) JPS60184257U (en)

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