JPS60184256U - ion impact gun - Google Patents

ion impact gun

Info

Publication number
JPS60184256U
JPS60184256U JP7112784U JP7112784U JPS60184256U JP S60184256 U JPS60184256 U JP S60184256U JP 7112784 U JP7112784 U JP 7112784U JP 7112784 U JP7112784 U JP 7112784U JP S60184256 U JPS60184256 U JP S60184256U
Authority
JP
Japan
Prior art keywords
impact gun
ion impact
gun
ion
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7112784U
Other languages
Japanese (ja)
Inventor
小口　民雄
Original Assignee
セイコーエプソン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーエプソン株式会社 filed Critical セイコーエプソン株式会社
Priority to JP7112784U priority Critical patent/JPS60184256U/en
Publication of JPS60184256U publication Critical patent/JPS60184256U/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本考案のイオン衝撃銃の実施例を示す図であ
る。 １・・・熱陰極フィラメント、２・・・グリッド、３・
・・アノード、４・・・外筒、５・・・円筒型電磁石、
６・・・試料。FIG. 1 is a diagram showing an embodiment of the ion bombardment gun of the present invention. 1... Hot cathode filament, 2... Grid, 3...
... Anode, 4... Outer tube, 5... Cylindrical electromagnet,
6...Sample.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 表面分析装置において、試料表面を清浄にするためおよ
び深さ方向の分析を行なうためのイオン衝撃銃に円筒型
電磁石を付加することを特徴とするイオン衝撃銃。An ion impact gun for use in a surface analysis device, characterized in that a cylindrical electromagnet is added to the ion impact gun for cleaning the surface of a sample and for performing analysis in the depth direction.
JP7112784U 1984-05-16 1984-05-16 ion impact gun Pending JPS60184256U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7112784U JPS60184256U (en) 1984-05-16 1984-05-16 ion impact gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7112784U JPS60184256U (en) 1984-05-16 1984-05-16 ion impact gun

Publications (1)

Publication Number Publication Date
JPS60184256U true JPS60184256U (en) 1985-12-06

Family

ID=30608339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7112784U Pending JPS60184256U (en) 1984-05-16 1984-05-16 ion impact gun

Country Status (1)

Country Link
JP (1) JPS60184256U (en)

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