JPS5895232U - liquid metal ion source - Google Patents

liquid metal ion source

Info

Publication number
JPS5895232U
JPS5895232U JP19069581U JP19069581U JPS5895232U JP S5895232 U JPS5895232 U JP S5895232U JP 19069581 U JP19069581 U JP 19069581U JP 19069581 U JP19069581 U JP 19069581U JP S5895232 U JPS5895232 U JP S5895232U
Authority
JP
Japan
Prior art keywords
liquid metal
ion source
metal ion
opening
reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19069581U
Other languages
Japanese (ja)
Inventor
昌彦 奥貫
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP19069581U priority Critical patent/JPS5895232U/en
Publication of JPS5895232U publication Critical patent/JPS5895232U/en
Pending legal-status Critical Current

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Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は液体金属イオン源を示す図、第２及び第３図は
該イオン源に使用される従来のリザーバ部を示す図、第
４図及び第６図は本考案の一実施例のリザーバ部を示す
図、第５図及び第７図は夫々第４図及び第６図に示され
たリザーバ部の底部断面図である。 １：リザーバ、２：開口、３：針状部材、４．５＝フイ
ラメント、６：碍子、？、　　８：ステム、９：電極、
１０：液体金属、１１：リザーバ、１２：開口、１３：
流路、１４：リザーバ、１５：開口。FIG. 1 shows a liquid metal ion source, FIGS. 2 and 3 show a conventional reservoir used in the ion source, and FIGS. 4 and 6 show a reservoir according to an embodiment of the present invention. FIGS. 5 and 7 are bottom sectional views of the reservoir portion shown in FIGS. 4 and 6, respectively. 1: Reservoir, 2: Opening, 3: Needle-shaped member, 4.5 = Filament, 6: Insulator, ? , 8: Stem, 9: Electrode,
10: Liquid metal, 11: Reservoir, 12: Opening, 13:
Channel, 14: Reservoir, 15: Opening.

Claims (1)

【実用新案登録請求の範囲】 １　底部に開口を有した液体金属を保持するリザーバと
、該リザーバ内部を通り、該底部の開口を貫通して配置
された針状部材と、該針状部材の先端に強電界を形成す
るための手段とを備えたイオン源において、該開口によ
って該針状部材先端部の位置決めを行うように構成し、
該底部に液体金属の流出部を設けたことを特徴とする液
体金属イオン源。 ２　該リザーバの底部には該針状部材が貫通する開口と
は別個に液体金属の流出孔が設けられた実用新案登録請
求の範囲第１項記載の液体金属イオン源。 ３　該リザーバ底部の開口は細長（され、その中心部に
おいて該針状部材を支持するようにした実用新案登録請
求の範囲第１項記載の液体金属イオン源。[Claims for Utility Model Registration] 1. A reservoir for holding liquid metal having an opening at the bottom, a needle-like member disposed through the inside of the reservoir and penetrating the opening at the bottom, and and means for forming a strong electric field at the tip, the ion source is configured to position the tip of the needle-like member by the opening,
A liquid metal ion source characterized in that a liquid metal outflow portion is provided at the bottom of the liquid metal ion source. 2. The liquid metal ion source according to claim 1, wherein the bottom of the reservoir is provided with a liquid metal outflow hole separate from the opening through which the needle member passes. 3. The liquid metal ion source according to claim 1, wherein the opening at the bottom of the reservoir is elongated and supports the needle-like member at its center.
JP19069581U 1981-12-21 1981-12-21 liquid metal ion source Pending JPS5895232U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19069581U JPS5895232U (en) 1981-12-21 1981-12-21 liquid metal ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19069581U JPS5895232U (en) 1981-12-21 1981-12-21 liquid metal ion source

Publications (1)

Publication Number Publication Date
JPS5895232U true JPS5895232U (en) 1983-06-28

Family

ID=30104216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19069581U Pending JPS5895232U (en) 1981-12-21 1981-12-21 liquid metal ion source

Country Status (1)

Country Link
JP (1) JPS5895232U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475636A (en) * 1967-11-14 1969-10-28 Hughes Aircraft Co Liquid-metal arc cathode with maximized electron/atom emission ratio
JPS5633468A (en) * 1979-08-23 1981-04-03 Atomic Energy Authority Uk Spray generating source of fine droplet and ion of liquid material

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475636A (en) * 1967-11-14 1969-10-28 Hughes Aircraft Co Liquid-metal arc cathode with maximized electron/atom emission ratio
JPS5633468A (en) * 1979-08-23 1981-04-03 Atomic Energy Authority Uk Spray generating source of fine droplet and ion of liquid material

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