JPS5895232U - liquid metal ion source - Google Patents
liquid metal ion sourceInfo
- Publication number
- JPS5895232U JPS5895232U JP19069581U JP19069581U JPS5895232U JP S5895232 U JPS5895232 U JP S5895232U JP 19069581 U JP19069581 U JP 19069581U JP 19069581 U JP19069581 U JP 19069581U JP S5895232 U JPS5895232 U JP S5895232U
- Authority
- JP
- Japan
- Prior art keywords
- liquid metal
- ion source
- metal ion
- opening
- reservoir
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は液体金属イオン源を示す図、第2及び第3図は
該イオン源に使用される従来のリザーバ部を示す図、第
4図及び第6図は本考案の一実施例のリザーバ部を示す
図、第5図及び第7図は夫々第4図及び第6図に示され
たリザーバ部の底部断面図である。
1:リザーバ、2:開口、3:針状部材、4.5=フイ
ラメント、6:碍子、?、 8:ステム、9:電極、
10:液体金属、11:リザーバ、12:開口、13:
流路、14:リザーバ、15:開口。FIG. 1 shows a liquid metal ion source, FIGS. 2 and 3 show a conventional reservoir used in the ion source, and FIGS. 4 and 6 show a reservoir according to an embodiment of the present invention. FIGS. 5 and 7 are bottom sectional views of the reservoir portion shown in FIGS. 4 and 6, respectively. 1: Reservoir, 2: Opening, 3: Needle-shaped member, 4.5 = Filament, 6: Insulator, ? , 8: Stem, 9: Electrode,
10: Liquid metal, 11: Reservoir, 12: Opening, 13:
Channel, 14: Reservoir, 15: Opening.
Claims (1)
、該リザーバ内部を通り、該底部の開口を貫通して配置
された針状部材と、該針状部材の先端に強電界を形成す
るための手段とを備えたイオン源において、該開口によ
って該針状部材先端部の位置決めを行うように構成し、
該底部に液体金属の流出部を設けたことを特徴とする液
体金属イオン源。 2 該リザーバの底部には該針状部材が貫通する開口と
は別個に液体金属の流出孔が設けられた実用新案登録請
求の範囲第1項記載の液体金属イオン源。 3 該リザーバ底部の開口は細長(され、その中心部に
おいて該針状部材を支持するようにした実用新案登録請
求の範囲第1項記載の液体金属イオン源。[Claims for Utility Model Registration] 1. A reservoir for holding liquid metal having an opening at the bottom, a needle-like member disposed through the inside of the reservoir and penetrating the opening at the bottom, and and means for forming a strong electric field at the tip, the ion source is configured to position the tip of the needle-like member by the opening,
A liquid metal ion source characterized in that a liquid metal outflow portion is provided at the bottom of the liquid metal ion source. 2. The liquid metal ion source according to claim 1, wherein the bottom of the reservoir is provided with a liquid metal outflow hole separate from the opening through which the needle member passes. 3. The liquid metal ion source according to claim 1, wherein the opening at the bottom of the reservoir is elongated and supports the needle-like member at its center.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19069581U JPS5895232U (en) | 1981-12-21 | 1981-12-21 | liquid metal ion source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19069581U JPS5895232U (en) | 1981-12-21 | 1981-12-21 | liquid metal ion source |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5895232U true JPS5895232U (en) | 1983-06-28 |
Family
ID=30104216
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19069581U Pending JPS5895232U (en) | 1981-12-21 | 1981-12-21 | liquid metal ion source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5895232U (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3475636A (en) * | 1967-11-14 | 1969-10-28 | Hughes Aircraft Co | Liquid-metal arc cathode with maximized electron/atom emission ratio |
JPS5633468A (en) * | 1979-08-23 | 1981-04-03 | Atomic Energy Authority Uk | Spray generating source of fine droplet and ion of liquid material |
-
1981
- 1981-12-21 JP JP19069581U patent/JPS5895232U/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3475636A (en) * | 1967-11-14 | 1969-10-28 | Hughes Aircraft Co | Liquid-metal arc cathode with maximized electron/atom emission ratio |
JPS5633468A (en) * | 1979-08-23 | 1981-04-03 | Atomic Energy Authority Uk | Spray generating source of fine droplet and ion of liquid material |
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