JPS6017465U - Sample stand for semiconductor measurement - Google Patents
Sample stand for semiconductor measurementInfo
- Publication number
- JPS6017465U JPS6017465U JP10999483U JP10999483U JPS6017465U JP S6017465 U JPS6017465 U JP S6017465U JP 10999483 U JP10999483 U JP 10999483U JP 10999483 U JP10999483 U JP 10999483U JP S6017465 U JPS6017465 U JP S6017465U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- semiconductor measurement
- sample stand
- bell jar
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案による試料台およびその周辺の構成の一
例を図式的に示す図である。
１・・・・・・試料台、２・・・・・・試料、３・・・
・・・熱交換部、４・・・・・・熱媒体加熱器、５・・
・・・・低温液体溜め、６・・・・・・循環用ポンプ、
７・・・・・・ベルジャ、８・・間真空ポンプ、９・・
・・−ノーク・バルブ、１０・・・・・・プローブ、１
１・・・・・・蛇腹、１２・・・・・・Ｘ−Ｙスキャン
部、１３・・・・・・モータ、１４・・・・・・プロー
ブ昇降部、１５゜１６・・・・・・開閉弁。FIG. 1 is a diagram schematically showing an example of the structure of a sample stage and its surroundings according to the present invention. 1...sample stand, 2...sample, 3...
... Heat exchange section, 4 ... Heat medium heater, 5 ...
...Low temperature liquid reservoir, 6...Circulation pump,
7...bell jar, 8...vacuum pump, 9...
...-Nok valve, 10... Probe, 1
1... Bellows, 12... X-Y scanning section, 13... Motor, 14... Probe lifting section, 15° 16...・Opening/closing valve.
Claims (1)
って電磁弁からなる開閉弁および電気的に絶縁されたパ
イプを介して試料台の熱交換部に供給され、排気するこ
とができ、内部に測定しようとする試料が置かれるベル
ジャを含み、該ベルジャ内にあるプローブが蛇腹を介し
て外部のＸ−Ｙスキャン部と接続されており、上記Ｘ−
Ｙスキャン・プローブがコンピュータで制御され、試料
上の電極に自動的に接触できることを特徴とする半導体
測定用試料台。It has a heat source outside the sample stage, and the heat medium is supplied to the heat exchange part of the sample stage by a circulation pump through an on-off valve consisting of a solenoid valve and an electrically insulated pipe, and can be exhausted. It includes a bell jar in which a sample to be measured is placed, and a probe in the bell jar is connected to an external X-Y scanning section via a bellows.
A sample stand for semiconductor measurement characterized in that a Y-scan probe is controlled by a computer and can automatically contact electrodes on a sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10999483U JPS6017465U (en) | 1983-07-15 | 1983-07-15 | Sample stand for semiconductor measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10999483U JPS6017465U (en) | 1983-07-15 | 1983-07-15 | Sample stand for semiconductor measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6017465U true JPS6017465U (en) | 1985-02-06 |
Family
ID=30256003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10999483U Pending JPS6017465U (en) | 1983-07-15 | 1983-07-15 | Sample stand for semiconductor measurement |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6017465U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5768039U (en) * | 1980-10-11 | 1982-04-23 |
-
1983
- 1983-07-15 JP JP10999483U patent/JPS6017465U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5768039U (en) * | 1980-10-11 | 1982-04-23 | ||
| JPS6017465Y2 (en) * | 1980-10-11 | 1985-05-29 | 理研軽金属工業株式会社 | Hanging bracket for ceiling inspection openings, etc. |
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