JPS614426U - Upper lid structure of vertical heat treatment equipment for semiconductor articles - Google Patents
Upper lid structure of vertical heat treatment equipment for semiconductor articlesInfo
- Publication number
- JPS614426U JPS614426U JP8788584U JP8788584U JPS614426U JP S614426 U JPS614426 U JP S614426U JP 8788584 U JP8788584 U JP 8788584U JP 8788584 U JP8788584 U JP 8788584U JP S614426 U JPS614426 U JP S614426U
- Authority
- JP
- Japan
- Prior art keywords
- upper lid
- heat treatment
- vertical heat
- lid structure
- semiconductor articles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Vertical, Hearth, Or Arc Furnaces (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の第１の実施例による縦型拡散炉の概略
縦断面図、第２図は同上の上蓋構造を示す部分拡大縦断
面図、第３図は同上の上蓋の斜視図、第４図は本考案の
第２の実施例による上蓋構， 造を示す第２図と同様の
部分拡大縦断面図、第５Ａ図は断熱用板状部の冥形例を
示す第２図と同様の部分拡大縦断面図、第５Ｂ図は断熱
用板状部の別の変形例を示す第２図と同様の部分拡大縦
断面図である。
なお図面に用いた符ｉにおいて、１・・・・・・処理管
、４・・・・・・ヒータ、５・・・・・・シリコンウェ
ハ、６・・・・・・ウエハボート、２０・・・・・一上
蓋、２１・・ｉ・・・上蓋部、２２・・・・・・断熱用
板状部、３０・・・・・・上蓋、３１・・・・・・上蓋
部、３２，３３・・・・・・断熱用板状部、４０，５０
・・・・・・断熱用板状部である。FIG. 1 is a schematic vertical sectional view of a vertical diffusion furnace according to a first embodiment of the present invention, FIG. 2 is a partially enlarged vertical sectional view showing the upper lid structure of the above, and FIG. 3 is a perspective view of the upper lid of the same. Fig. 4 is a partially enlarged vertical cross-sectional view similar to Fig. 2 showing the top cover structure according to the second embodiment of the present invention, and Fig. 5A is a partial enlarged longitudinal sectional view similar to Fig. 2 showing an example of the shape of the heat insulating plate portion. FIG. 5B is a partially enlarged longitudinal sectional view similar to FIG. 2 showing another modification of the heat insulating plate portion. In addition, in the reference numeral i used in the drawings, 1... processing tube, 4... heater, 5... silicon wafer, 6... wafer boat, 20... ... Upper lid, 21...i... Upper lid part, 22... Heat insulation plate part, 30... Upper lid, 31... Upper lid part, 32 , 33... Plate-shaped part for heat insulation, 40, 50
...This is a plate-shaped part for heat insulation.
Claims (1)
理管を具備する半導体物品の縦型熱処理装置において、
前記処理管の上蓋部が、前記処理管の内部側に配された
少なくとも１枚の断熱用板状部を具備していることを特
徴とする半導体物品の縦型熱処理装置の上蓋構造。A vertical heat treatment apparatus for semiconductor articles comprising a processing tube arranged such that its longitudinal axis extends substantially vertically,
An upper lid structure for a vertical heat treatment apparatus for semiconductor articles, wherein the upper lid portion of the processing tube includes at least one heat-insulating plate portion disposed inside the processing tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8788584U JPS614426U (en) | 1984-06-13 | 1984-06-13 | Upper lid structure of vertical heat treatment equipment for semiconductor articles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8788584U JPS614426U (en) | 1984-06-13 | 1984-06-13 | Upper lid structure of vertical heat treatment equipment for semiconductor articles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS614426U true JPS614426U (en) | 1986-01-11 |
Family
ID=30640510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8788584U Pending JPS614426U (en) | 1984-06-13 | 1984-06-13 | Upper lid structure of vertical heat treatment equipment for semiconductor articles |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS614426U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01183813A (en) * | 1988-01-18 | 1989-07-21 | Tel Sagami Ltd | Conveyor for transporting body to be treated into heat treating furnace |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5179579A (en) * | 1975-01-08 | 1976-07-10 | Hitachi Ltd | KANETSURO |
-
1984
- 1984-06-13 JP JP8788584U patent/JPS614426U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5179579A (en) * | 1975-01-08 | 1976-07-10 | Hitachi Ltd | KANETSURO |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01183813A (en) * | 1988-01-18 | 1989-07-21 | Tel Sagami Ltd | Conveyor for transporting body to be treated into heat treating furnace |
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