JPS58173159U - Sample temperature change device in particle beam equipment - Google Patents
Sample temperature change device in particle beam equipmentInfo
- Publication number
- JPS58173159U JPS58173159U JP6947782U JP6947782U JPS58173159U JP S58173159 U JPS58173159 U JP S58173159U JP 6947782 U JP6947782 U JP 6947782U JP 6947782 U JP6947782 U JP 6947782U JP S58173159 U JPS58173159 U JP S58173159U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- particle beam
- welded
- sample temperature
- spot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案による１実施例を示す概略構成断面図、
第２図は要部の拡大断面図を示す。
１・・・加熱炉、２・・・不導体、３・・・支持部材、
４・・・穴、５・・・ねじ、６・・・試料台、７・・・
ヒーター、８・・・ヒーターカバー、９・・・試料、１
０・・・試料押え、１１・・・中間部材、１２・・・受
は板、１３・・・リードセン、１４・・・気密端子、１
５・・・コード、１６・・・柄部、１７・・・ピボット
。FIG. 1 is a schematic cross-sectional view showing one embodiment of the present invention;
FIG. 2 shows an enlarged sectional view of the main part. 1... Heating furnace, 2... Nonconductor, 3... Supporting member,
4... Hole, 5... Screw, 6... Sample stand, 7...
Heater, 8... Heater cover, 9... Sample, 1
0... Sample holder, 11... Intermediate member, 12... Receiver is plate, 13... Lead sensor, 14... Airtight terminal, 1
5... Cord, 16... Handle, 17... Pivot.
Claims (1)
持している試料保持部と、この試料保持部を支持する支
持部材とで構成された粒子線装置における試料温度変化
装置において、前記試料保持部と前記支持部材との間に
スポット溶接可能な中間部材を設ける構成とし、前記試
料保持部に前記中間部材を、前記中間部材に前記支持部
材をそれぞれスポット溶接しであることを特徴とする粒
子線装置における試料温度変化装置。 ２ 上記中間部材は点、又は線状の形状で上記試料保持
部と上記支持部材をそれぞれスポット溶接しであること
を特徴とする請求の範囲第１項記載の粒子線装置におけ
る試料温度変化装置。[Claims for Utility Model Registration] 1. A particle beam device consisting of a sample holder that holds a sample placed on an electron beam path so that its temperature can be changed, and a support member that supports this sample holder. In the sample temperature changing device, an intermediate member that can be spot welded is provided between the sample holding part and the supporting member, and the intermediate member is spot-welded to the sample holding part, and the supporting member is spot-welded to the intermediate member. A sample temperature changing device in a particle beam device characterized by being welded. 2. A sample temperature changing device in a particle beam device according to claim 1, wherein the intermediate member has a point or linear shape and is spot-welded to the sample holding portion and the supporting member, respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6947782U JPS58173159U (en) | 1982-05-14 | 1982-05-14 | Sample temperature change device in particle beam equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6947782U JPS58173159U (en) | 1982-05-14 | 1982-05-14 | Sample temperature change device in particle beam equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58173159U true JPS58173159U (en) | 1983-11-19 |
Family
ID=30079205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6947782U Pending JPS58173159U (en) | 1982-05-14 | 1982-05-14 | Sample temperature change device in particle beam equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58173159U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011066018A1 (en) | 2009-11-27 | 2011-06-03 | Hysitron, Inc. | Micro electro-mechanical heater |
| US9476816B2 (en) | 2011-11-14 | 2016-10-25 | Hysitron, Inc. | Probe tip heating assembly |
-
1982
- 1982-05-14 JP JP6947782U patent/JPS58173159U/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011066018A1 (en) | 2009-11-27 | 2011-06-03 | Hysitron, Inc. | Micro electro-mechanical heater |
| JP2013512545A (en) * | 2009-11-27 | 2013-04-11 | ハイジトロン，インク． | Micro electromechanical heater |
| JP2016029662A (en) * | 2009-11-27 | 2016-03-03 | ハイジトロン, インク.Hysitron, Inc. | Micro electro-mechanical heater |
| US9316569B2 (en) | 2009-11-27 | 2016-04-19 | Hysitron, Inc. | Micro electro-mechanical heater |
| EP2504671A4 (en) * | 2009-11-27 | 2017-11-08 | Hysitron, Inc. | Micro electro-mechanical heater |
| US9476816B2 (en) | 2011-11-14 | 2016-10-25 | Hysitron, Inc. | Probe tip heating assembly |
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