JPS5970333U - プラズマ化学気相生成装置 - Google Patents

プラズマ化学気相生成装置

Info

Publication number
JPS5970333U
JPS5970333U JP16486482U JP16486482U JPS5970333U JP S5970333 U JPS5970333 U JP S5970333U JP 16486482 U JP16486482 U JP 16486482U JP 16486482 U JP16486482 U JP 16486482U JP S5970333 U JPS5970333 U JP S5970333U
Authority
JP
Japan
Prior art keywords
reaction tube
vapor phase
reaction
outer cylindrical
peripheral surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16486482U
Other languages
English (en)
Japanese (ja)
Other versions
JPH041730Y2 (enrdf_load_stackoverflow
Inventor
遠藤　好英
博信 宮
堀田　雄一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP16486482U priority Critical patent/JPS5970333U/ja
Publication of JPS5970333U publication Critical patent/JPS5970333U/ja
Application granted granted Critical
Publication of JPH041730Y2 publication Critical patent/JPH041730Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Chemical Vapour Deposition (AREA)
JP16486482U 1982-10-29 1982-10-29 プラズマ化学気相生成装置 Granted JPS5970333U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16486482U JPS5970333U (ja) 1982-10-29 1982-10-29 プラズマ化学気相生成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16486482U JPS5970333U (ja) 1982-10-29 1982-10-29 プラズマ化学気相生成装置

Publications (2)

Publication Number Publication Date
JPS5970333U true JPS5970333U (ja) 1984-05-12
JPH041730Y2 JPH041730Y2 (enrdf_load_stackoverflow) 1992-01-21

Family

ID=30361335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16486482U Granted JPS5970333U (ja) 1982-10-29 1982-10-29 プラズマ化学気相生成装置

Country Status (1)

Country Link
JP (1) JPS5970333U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5456366A (en) * 1977-10-14 1979-05-07 Hitachi Ltd Plasma film forming apparatus
JPS5673428A (en) * 1979-11-21 1981-06-18 Canon Inc Method of forming film
JPS5694037U (enrdf_load_stackoverflow) * 1979-12-20 1981-07-25

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5456366A (en) * 1977-10-14 1979-05-07 Hitachi Ltd Plasma film forming apparatus
JPS5673428A (en) * 1979-11-21 1981-06-18 Canon Inc Method of forming film
JPS5694037U (enrdf_load_stackoverflow) * 1979-12-20 1981-07-25

Also Published As

Publication number Publication date
JPH041730Y2 (enrdf_load_stackoverflow) 1992-01-21

Similar Documents

Publication Publication Date Title
KR920015620A (ko) 양자 상간섭 트랜지스터 및 그 선택증착방법
KR900005854A (ko) 플라즈마 처리방법 및 장치
JPS5970333U (ja) プラズマ化学気相生成装置
JPS5838783U (ja) 量産型薄膜製造装置
JPH0545672B2 (enrdf_load_stackoverflow)
JPS60151295U (ja) 低温プラズマ発生用電極
JPS6453758U (enrdf_load_stackoverflow)
JPS60119743U (ja) 化学的気相付着装置
JPS59117138U (ja) 半導体製造装置
JPS6061722U (ja) 成膜装置
JPS58158359U (ja) 沃素発生器付暴露用装置
JPS609964U (ja) プラズマ・化学気相成長装置
JPS5845359U (ja) 電子写真用感光体の製造装置
KR870006636A (ko) 반도체 기판의 열처리 장치
JPS6246143Y2 (enrdf_load_stackoverflow)
JPS5926238U (ja) Ｃｖｄ装置
JPS6453759U (enrdf_load_stackoverflow)
JPH0233261U (enrdf_load_stackoverflow)
JPH01106564U (enrdf_load_stackoverflow)
JPS58151666U (ja) プラズマ・エツチング装置
JPS5995259U (ja) 液体試料導入装置
JPS60129132U (ja) プラズマ気相成長装置の電極板と基板の配置
JPS60111042U (ja) 熱処理装置
JPH0624708A (ja) 径の異なる二本の金属管に、ホーロー 被膜を施したオゾン発生器
JPS616276A (ja) プラズマｃｖｄ装置