JPS5961531U - 液相エピタキシヤル成長装置 - Google Patents

液相エピタキシヤル成長装置

Info

Publication number
JPS5961531U
JPS5961531U JP15767582U JP15767582U JPS5961531U JP S5961531 U JPS5961531 U JP S5961531U JP 15767582 U JP15767582 U JP 15767582U JP 15767582 U JP15767582 U JP 15767582U JP S5961531 U JPS5961531 U JP S5961531U
Authority
JP
Japan
Prior art keywords
epitaxial growth
liquid phase
phase epitaxial
boat
growth equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15767582U
Other languages
English (en)
Japanese (ja)
Other versions
JPH025529Y2 (OSRAM
Inventor
片山　修治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Tottori Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tottori Sanyo Electric Co Ltd, Sanyo Electric Co Ltd filed Critical Tottori Sanyo Electric Co Ltd
Priority to JP15767582U priority Critical patent/JPS5961531U/ja
Publication of JPS5961531U publication Critical patent/JPS5961531U/ja
Application granted granted Critical
Publication of JPH025529Y2 publication Critical patent/JPH025529Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP15767582U 1982-10-19 1982-10-19 液相エピタキシヤル成長装置 Granted JPS5961531U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15767582U JPS5961531U (ja) 1982-10-19 1982-10-19 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15767582U JPS5961531U (ja) 1982-10-19 1982-10-19 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS5961531U true JPS5961531U (ja) 1984-04-23
JPH025529Y2 JPH025529Y2 (OSRAM) 1990-02-09

Family

ID=30347559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15767582U Granted JPS5961531U (ja) 1982-10-19 1982-10-19 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS5961531U (OSRAM)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623956A (en) * 1979-08-01 1981-03-06 Tokyo Electric Co Ltd Automatic electric moxa cautery device
JPS58138330U (ja) * 1982-03-11 1983-09-17 日本電気株式会社 液相エピタキシヤル成長装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623956A (en) * 1979-08-01 1981-03-06 Tokyo Electric Co Ltd Automatic electric moxa cautery device
JPS58138330U (ja) * 1982-03-11 1983-09-17 日本電気株式会社 液相エピタキシヤル成長装置

Also Published As

Publication number Publication date
JPH025529Y2 (OSRAM) 1990-02-09

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