JPS5958640A - 基板成形用スタンパ - Google Patents
基板成形用スタンパInfo
- Publication number
- JPS5958640A JPS5958640A JP16862382A JP16862382A JPS5958640A JP S5958640 A JPS5958640 A JP S5958640A JP 16862382 A JP16862382 A JP 16862382A JP 16862382 A JP16862382 A JP 16862382A JP S5958640 A JPS5958640 A JP S5958640A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- stamper
- layer
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 43
- 239000010409 thin film Substances 0.000 claims abstract description 33
- 239000010408 film Substances 0.000 claims abstract description 30
- 239000002184 metal Substances 0.000 claims abstract description 19
- 229910052751 metal Inorganic materials 0.000 claims abstract description 19
- 239000011347 resin Substances 0.000 claims abstract description 10
- 229920005989 resin Polymers 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 4
- 239000000853 adhesive Substances 0.000 claims abstract description 3
- 230000001070 adhesive effect Effects 0.000 claims abstract description 3
- 229910052804 chromium Inorganic materials 0.000 claims abstract 3
- 229910052737 gold Inorganic materials 0.000 claims abstract 2
- 238000000465 moulding Methods 0.000 claims description 7
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 abstract description 9
- 239000011521 glass Substances 0.000 abstract description 8
- 238000005187 foaming Methods 0.000 abstract 1
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000005266 casting Methods 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000005323 electroforming Methods 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 229910052735 hafnium Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229920002319 Poly(methyl acrylate) Polymers 0.000 description 1
- 229910003069 TeO2 Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000003578 releasing effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000006188 syrup Substances 0.000 description 1
- 235000020357 syrup Nutrition 0.000 description 1
- LAJZODKXOMJMPK-UHFFFAOYSA-N tellurium dioxide Chemical compound O=[Te]=O LAJZODKXOMJMPK-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
- G11B23/0057—Intermediate mediums, i.e. mediums provided with an information structure not specific to the method of reproducing or duplication such as matrixes for mechanical pressing of an information structure ; record carriers having a relief information structure provided with or included in layers not specific for a single reproducing method; apparatus or processes specially adapted for their manufacture
Landscapes
- Moulds For Moulding Plastics Or The Like (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16862382A JPS5958640A (ja) | 1982-09-29 | 1982-09-29 | 基板成形用スタンパ |
| EP83305768A EP0107913B1 (en) | 1982-09-29 | 1983-09-27 | Radiation-sensitive carrier body utilized as stamper structure |
| DE8383305768T DE3377173D1 (en) | 1982-09-29 | 1983-09-27 | Radiation-sensitive carrier body utilized as stamper structure |
| US06/630,232 US4565772A (en) | 1982-09-29 | 1984-07-12 | Process of using radiation-sensitive carrier body to form stamper structure and subsequent use as a stamper to make optical disks |
| US06/939,292 US4845000A (en) | 1982-09-29 | 1986-12-04 | Radiation sensitive carrier body utilized as stamper structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16862382A JPS5958640A (ja) | 1982-09-29 | 1982-09-29 | 基板成形用スタンパ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5958640A true JPS5958640A (ja) | 1984-04-04 |
| JPH0252331B2 JPH0252331B2 (enrdf_load_stackoverflow) | 1990-11-13 |
Family
ID=15871486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16862382A Granted JPS5958640A (ja) | 1982-09-29 | 1982-09-29 | 基板成形用スタンパ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5958640A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007502511A (ja) * | 2003-05-21 | 2007-02-08 | サムスン エレクトロニクス カンパニー リミテッド | 複数層構造体、及びこの構造体への微細構造の描画方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5665340A (en) * | 1979-10-17 | 1981-06-03 | Rca Corp | Recordinggmedium for optical recording and regeneration |
| JPS56124135A (en) * | 1980-02-01 | 1981-09-29 | Thomson Csf | Thermal optical writing permanent memory structure and optically reading and writing method |
-
1982
- 1982-09-29 JP JP16862382A patent/JPS5958640A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5665340A (en) * | 1979-10-17 | 1981-06-03 | Rca Corp | Recordinggmedium for optical recording and regeneration |
| JPS56124135A (en) * | 1980-02-01 | 1981-09-29 | Thomson Csf | Thermal optical writing permanent memory structure and optically reading and writing method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007502511A (ja) * | 2003-05-21 | 2007-02-08 | サムスン エレクトロニクス カンパニー リミテッド | 複数層構造体、及びこの構造体への微細構造の描画方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0252331B2 (enrdf_load_stackoverflow) | 1990-11-13 |
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