JPS5956772A - 半導体圧力センサの製造方法 - Google Patents

半導体圧力センサの製造方法

Info

Publication number
JPS5956772A
JPS5956772A JP58069985A JP6998583A JPS5956772A JP S5956772 A JPS5956772 A JP S5956772A JP 58069985 A JP58069985 A JP 58069985A JP 6998583 A JP6998583 A JP 6998583A JP S5956772 A JPS5956772 A JP S5956772A
Authority
JP
Japan
Prior art keywords
layer
pressure sensor
wire connection
semiconductor pressure
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58069985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6222539B2 (enrdf_load_stackoverflow
Inventor
Shunji Shiromizu
白水　俊次
Tadahiro Hayashi
林　忠広
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58069985A priority Critical patent/JPS5956772A/ja
Publication of JPS5956772A publication Critical patent/JPS5956772A/ja
Publication of JPS6222539B2 publication Critical patent/JPS6222539B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP58069985A 1983-04-22 1983-04-22 半導体圧力センサの製造方法 Granted JPS5956772A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58069985A JPS5956772A (ja) 1983-04-22 1983-04-22 半導体圧力センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58069985A JPS5956772A (ja) 1983-04-22 1983-04-22 半導体圧力センサの製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP4255476A Division JPS5922377B2 (ja) 1976-04-16 1976-04-16 半導体装置

Publications (2)

Publication Number Publication Date
JPS5956772A true JPS5956772A (ja) 1984-04-02
JPS6222539B2 JPS6222539B2 (enrdf_load_stackoverflow) 1987-05-19

Family

ID=13418467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58069985A Granted JPS5956772A (ja) 1983-04-22 1983-04-22 半導体圧力センサの製造方法

Country Status (1)

Country Link
JP (1) JPS5956772A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6222539B2 (enrdf_load_stackoverflow) 1987-05-19

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