JPS6222539B2 - - Google Patents
Info
- Publication number
- JPS6222539B2 JPS6222539B2 JP58069985A JP6998583A JPS6222539B2 JP S6222539 B2 JPS6222539 B2 JP S6222539B2 JP 58069985 A JP58069985 A JP 58069985A JP 6998583 A JP6998583 A JP 6998583A JP S6222539 B2 JPS6222539 B2 JP S6222539B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode layer
- layer
- wire connection
- pressure sensor
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/50—Devices controlled by mechanical forces, e.g. pressure
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58069985A JPS5956772A (ja) | 1983-04-22 | 1983-04-22 | 半導体圧力センサの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58069985A JPS5956772A (ja) | 1983-04-22 | 1983-04-22 | 半導体圧力センサの製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4255476A Division JPS5922377B2 (ja) | 1976-04-16 | 1976-04-16 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5956772A JPS5956772A (ja) | 1984-04-02 |
| JPS6222539B2 true JPS6222539B2 (enrdf_load_stackoverflow) | 1987-05-19 |
Family
ID=13418467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58069985A Granted JPS5956772A (ja) | 1983-04-22 | 1983-04-22 | 半導体圧力センサの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5956772A (enrdf_load_stackoverflow) |
-
1983
- 1983-04-22 JP JP58069985A patent/JPS5956772A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5956772A (ja) | 1984-04-02 |
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