JPS5956390A - Ｅｌ薄膜の形成方法 - Google Patents

Ｅｌ薄膜の形成方法

Info

Publication number
JPS5956390A
JPS5956390A JP57167128A JP16712882A JPS5956390A JP S5956390 A JPS5956390 A JP S5956390A JP 57167128 A JP57167128 A JP 57167128A JP 16712882 A JP16712882 A JP 16712882A JP S5956390 A JPS5956390 A JP S5956390A
Authority
JP
Japan
Prior art keywords
thin film
zns
film
forming
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57167128A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141111B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
大西　秀臣
家安　健三
圭弘 浜川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57167128A priority Critical patent/JPS5956390A/ja
Publication of JPS5956390A publication Critical patent/JPS5956390A/ja
Publication of JPS6141111B2 publication Critical patent/JPS6141111B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
JP57167128A 1982-09-24 1982-09-24 Ｅｌ薄膜の形成方法 Granted JPS5956390A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57167128A JPS5956390A (ja) 1982-09-24 1982-09-24 Ｅｌ薄膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57167128A JPS5956390A (ja) 1982-09-24 1982-09-24 Ｅｌ薄膜の形成方法

Publications (2)

Publication Number Publication Date
JPS5956390A true JPS5956390A (ja) 1984-03-31
JPS6141111B2 JPS6141111B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-12

Family

ID=15843949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57167128A Granted JPS5956390A (ja) 1982-09-24 1982-09-24 Ｅｌ薄膜の形成方法

Country Status (1)

Country Link
JP (1) JPS5956390A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62149866A (ja) * 1985-12-23 1987-07-03 Matsushita Electric Ind Co Ltd スパツタ用タ−ゲツト

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62149866A (ja) * 1985-12-23 1987-07-03 Matsushita Electric Ind Co Ltd スパツタ用タ−ゲツト

Also Published As

Publication number Publication date
JPS6141111B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-12

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