JPS5954154A - 電界放射形電子銃を有する粒子線装置 - Google Patents

電界放射形電子銃を有する粒子線装置

Info

Publication number
JPS5954154A
JPS5954154A JP57165279A JP16527982A JPS5954154A JP S5954154 A JPS5954154 A JP S5954154A JP 57165279 A JP57165279 A JP 57165279A JP 16527982 A JP16527982 A JP 16527982A JP S5954154 A JPS5954154 A JP S5954154A
Authority
JP
Japan
Prior art keywords
lens
field emission
emission type
electron
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57165279A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0370340B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Naotake Saito
斉藤　尚武
Yasushi Nakaizumi
泰 中泉
Hiroyoshi Mori
森　弘義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57165279A priority Critical patent/JPS5954154A/ja
Publication of JPS5954154A publication Critical patent/JPS5954154A/ja
Publication of JPH0370340B2 publication Critical patent/JPH0370340B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57165279A 1982-09-21 1982-09-21 電界放射形電子銃を有する粒子線装置 Granted JPS5954154A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57165279A JPS5954154A (ja) 1982-09-21 1982-09-21 電界放射形電子銃を有する粒子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57165279A JPS5954154A (ja) 1982-09-21 1982-09-21 電界放射形電子銃を有する粒子線装置

Publications (2)

Publication Number Publication Date
JPS5954154A true JPS5954154A (ja) 1984-03-28
JPH0370340B2 JPH0370340B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-07

Family

ID=15809306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57165279A Granted JPS5954154A (ja) 1982-09-21 1982-09-21 電界放射形電子銃を有する粒子線装置

Country Status (1)

Country Link
JP (1) JPS5954154A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60205952A (ja) * 1984-03-30 1985-10-17 Hitachi Ltd 電子顕微鏡
JPS61139562U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-02-21 1986-08-29
JPH02257556A (ja) * 1989-03-30 1990-10-18 Hitachi Ltd 電子顕微鏡

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60205952A (ja) * 1984-03-30 1985-10-17 Hitachi Ltd 電子顕微鏡
JPS61139562U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-02-21 1986-08-29
JPH02257556A (ja) * 1989-03-30 1990-10-18 Hitachi Ltd 電子顕微鏡

Also Published As

Publication number Publication date
JPH0370340B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-07

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