JPS5945443A - クロム・マスクの製造方法 - Google Patents

クロム・マスクの製造方法

Info

Publication number
JPS5945443A
JPS5945443A JP58102945A JP10294583A JPS5945443A JP S5945443 A JPS5945443 A JP S5945443A JP 58102945 A JP58102945 A JP 58102945A JP 10294583 A JP10294583 A JP 10294583A JP S5945443 A JPS5945443 A JP S5945443A
Authority
JP
Japan
Prior art keywords
layer
mask
pattern
etching
negative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58102945A
Other languages
English (en)
Japanese (ja)
Other versions
JPH035573B2 (enExample
Inventor
ギユンタ−・ボツク
ベルンハルト・ハフナ−
ラインホルフ・ミユ−ル
クラウス・ペテル・チ−ル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS5945443A publication Critical patent/JPS5945443A/ja
Publication of JPH035573B2 publication Critical patent/JPH035573B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/80—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
JP58102945A 1982-08-25 1983-06-10 クロム・マスクの製造方法 Granted JPS5945443A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP821077971 1982-08-25
EP82107797A EP0101752B1 (de) 1982-08-25 1982-08-25 Umkehrprozess zum Herstellen von Chrommasken

Publications (2)

Publication Number Publication Date
JPS5945443A true JPS5945443A (ja) 1984-03-14
JPH035573B2 JPH035573B2 (enExample) 1991-01-25

Family

ID=8189193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58102945A Granted JPS5945443A (ja) 1982-08-25 1983-06-10 クロム・マスクの製造方法

Country Status (4)

Country Link
US (1) US4489146A (enExample)
EP (1) EP0101752B1 (enExample)
JP (1) JPS5945443A (enExample)
DE (1) DE3272888D1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01304457A (ja) * 1988-06-02 1989-12-08 Fujitsu Ltd パターン形成方法
JP2013083920A (ja) * 2011-09-27 2013-05-09 Toppan Printing Co Ltd フォトマスクの製造方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6046074A (ja) * 1983-08-24 1985-03-12 Toshiba Corp 電界効果トランジスタの製造方法
US4706167A (en) * 1983-11-10 1987-11-10 Telemark Co., Inc. Circuit wiring disposed on solder mask coating
GB2189903A (en) * 1986-04-01 1987-11-04 Plessey Co Plc An etch technique for metal mask definition
US4774164A (en) * 1987-04-06 1988-09-27 Tegal Corporation Chrome mask etch
US5089361A (en) * 1990-08-17 1992-02-18 Industrial Technology Research Institute Mask making process
JP2000114246A (ja) * 1998-08-07 2000-04-21 Ulvac Seimaku Kk ドライエッチング方法および装置、フォトマスクおよびその作製方法、ならびに半導体回路およびその製作方法
US6409312B1 (en) 2001-03-27 2002-06-25 Lexmark International, Inc. Ink jet printer nozzle plate and process therefor
US6901653B2 (en) * 2002-04-02 2005-06-07 Hitachi Global Storage Technologies Netherlands B.V. Process for manufacturing a magnetic head coil structure
WO2020138855A1 (ko) * 2018-12-26 2020-07-02 주식회사 에스앤에스텍 블랭크 마스크 및 포토마스크
CN111487845A (zh) * 2019-01-29 2020-08-04 山东浪潮华光光电子股份有限公司 一种可以直接剥离的led管芯电极掩模图形的制作方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5314570A (en) * 1976-07-26 1978-02-09 Nippon Telegr & Teleph Corp <Ntt> Production of photo mask

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3795557A (en) * 1972-05-12 1974-03-05 Lfe Corp Process and material for manufacturing semiconductor devices
US4132586A (en) * 1977-12-20 1979-01-02 International Business Machines Corporation Selective dry etching of substrates
US4184909A (en) * 1978-08-21 1980-01-22 International Business Machines Corporation Method of forming thin film interconnection systems

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5314570A (en) * 1976-07-26 1978-02-09 Nippon Telegr & Teleph Corp <Ntt> Production of photo mask

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01304457A (ja) * 1988-06-02 1989-12-08 Fujitsu Ltd パターン形成方法
JP2013083920A (ja) * 2011-09-27 2013-05-09 Toppan Printing Co Ltd フォトマスクの製造方法

Also Published As

Publication number Publication date
EP0101752B1 (de) 1986-08-27
US4489146A (en) 1984-12-18
JPH035573B2 (enExample) 1991-01-25
DE3272888D1 (en) 1986-10-02
EP0101752A1 (de) 1984-03-07

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