JPS5944755A - 走査電子顕微鏡における視野傾斜装置 - Google Patents

走査電子顕微鏡における視野傾斜装置

Info

Publication number
JPS5944755A
JPS5944755A JP57155658A JP15565882A JPS5944755A JP S5944755 A JPS5944755 A JP S5944755A JP 57155658 A JP57155658 A JP 57155658A JP 15565882 A JP15565882 A JP 15565882A JP S5944755 A JPS5944755 A JP S5944755A
Authority
JP
Japan
Prior art keywords
signal
supplied
circuit
inclination
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57155658A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0232739B2 (cg-RX-API-DMAC7.html
Inventor
Kenji Obara
健二 小原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP57155658A priority Critical patent/JPS5944755A/ja
Publication of JPS5944755A publication Critical patent/JPS5944755A/ja
Publication of JPH0232739B2 publication Critical patent/JPH0232739B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57155658A 1982-09-06 1982-09-06 走査電子顕微鏡における視野傾斜装置 Granted JPS5944755A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57155658A JPS5944755A (ja) 1982-09-06 1982-09-06 走査電子顕微鏡における視野傾斜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57155658A JPS5944755A (ja) 1982-09-06 1982-09-06 走査電子顕微鏡における視野傾斜装置

Publications (2)

Publication Number Publication Date
JPS5944755A true JPS5944755A (ja) 1984-03-13
JPH0232739B2 JPH0232739B2 (cg-RX-API-DMAC7.html) 1990-07-23

Family

ID=15610772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57155658A Granted JPS5944755A (ja) 1982-09-06 1982-09-06 走査電子顕微鏡における視野傾斜装置

Country Status (1)

Country Link
JP (1) JPS5944755A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5537737B2 (ja) * 2012-06-08 2014-07-02 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5537737B2 (ja) * 2012-06-08 2014-07-02 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
JPH0232739B2 (cg-RX-API-DMAC7.html) 1990-07-23

Similar Documents

Publication Publication Date Title
US5081353A (en) Combined scanning electron and scanning tunnelling microscope apparatus and method
KR102552236B1 (ko) 복합 하전 입자 빔 장치
JP6250331B2 (ja) 複合荷電粒子ビーム装置及び薄片試料加工方法
US7016465B2 (en) X-ray CT apparatus
JP6255494B2 (ja) 電子顕微鏡、及び、試料の観察方法
JP5296578B2 (ja) 電子顕微鏡の自動試料傾斜装置
EP1071112B1 (en) Scanning charged-particle beam instrument
JPH073774B2 (ja) 電子顕微鏡
JPS5944755A (ja) 走査電子顕微鏡における視野傾斜装置
JP2001357811A (ja) 走査形荷電粒子顕微鏡、並びに走査形荷電粒子顕微鏡の焦点合わせ方法及び非点収差補正方法
JP7747057B2 (ja) 指向性エネルギビーム偏向フィールドモニタ及び補正器
JPS6020439A (ja) 荷電粒子線装置における試料回転装置
JPH11135046A (ja) 電子顕微鏡
JPH04106853A (ja) 走査電子顕微鏡
KR102515771B1 (ko) 화상 취득 방법 및 이온 빔 장치
JP2007128808A (ja) 電子顕微鏡の傾斜ステージ補正方法及び装置
JP3914787B2 (ja) 電子顕微鏡
JP3702685B2 (ja) 荷電粒子線装置
JP3717202B2 (ja) 電子顕微鏡及びその軸合わせ方法
JPH0619970B2 (ja) 走査電子顕微鏡
JPH0360150B2 (cg-RX-API-DMAC7.html)
JP4822920B2 (ja) ３次元像構築方法および透過電子顕微鏡
JPH11283548A (ja) 電子顕微鏡装置及びそれを用いた試料観察方法
JP3686466B2 (ja) 荷電粒子線装置
JPH0460298B2 (cg-RX-API-DMAC7.html)